EP 3201120 A1 20170809 - FABRICATION OF A STRUCTURE OF THERMAL EXCHANGER USING CAVITY CLOSURE BY ELECTROLYTIC DEPOSITION OF A LAYER
Title (en)
FABRICATION OF A STRUCTURE OF THERMAL EXCHANGER USING CAVITY CLOSURE BY ELECTROLYTIC DEPOSITION OF A LAYER
Title (de)
HERSTELLUNG EINES WÄRMETAUSCHER MIT EINEM HOHLRAUMVERSCHLUSS DURCH ELEKTROLYTISCHEN ABSCHEIDUNG EINER SCHICHT
Title (fr)
FABRICATION D'UNE STRUCTURE D'ECHANGEUR THERMIQUE UTILISANT LA FERMETURE DE CAVITE PAR DEPOT ELECTROLYTIQUE D'UNE COUCHE
Publication
Application
Priority
- FR 1459507 A 20141003
- EP 2015072735 W 20151001
Abstract (en)
[origin: WO2016050932A1] The invention relates to a method for producing a closed cavity on a substrate, comprising the steps consisting of: a) forming a cavity (5a) surrounded by at least one block on a given face of a substrate (1), the cavity having an aspect ratio h/cd higher than a determined threshold, and b) depositing a closing layer (20) on the at least one block surrounding the cavity, the aspect ratio of the cavity being such that in step b), the closing layer does not entirely fill said cavity and an empty space in the cavity is maintained.
IPC 8 full level
H01L 21/473 (2006.01); B81C 1/00 (2006.01)
CPC (source: EP US)
B23P 15/26 (2013.01 - US); B81C 1/00071 (2013.01 - EP US); C25D 5/022 (2013.01 - EP US); C25D 5/48 (2013.01 - US); C25D 7/123 (2013.01 - EP US); F28F 3/12 (2013.01 - EP); H01L 21/473 (2013.01 - EP US); H01L 23/473 (2013.01 - EP US); F28F 2220/00 (2013.01 - EP); H01L 21/0226 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US)
Citation (search report)
See references of WO 2016050932A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016050932 A1 20160407; EP 3201120 A1 20170809; FR 3026890 A1 20160408; FR 3026890 B1 20171222; US 2017241032 A1 20170824
DOCDB simple family (application)
EP 2015072735 W 20151001; EP 15771624 A 20151001; FR 1459507 A 20141003; US 201515514993 A 20151001