EP 3201563 A1 20170809 - DIFFRACTION MICROSCOPE METHOD AND DEVICE
Title (en)
DIFFRACTION MICROSCOPE METHOD AND DEVICE
Title (de)
DIFFRAKTIONSMIKROSKOPVERFAHREN UND -VORRICHTUNG
Title (fr)
METHODE ET DISPOSITIF DE MICROSCOPE DIFFRACTIVE
Publication
Application
Priority
- FR 1459500 A 20141003
- EP 2015070503 W 20150908
Abstract (en)
[origin: WO2016050460A1] According to one aspect, the invention relates to a device (100, 200, 300, 400, 500) for measuring the distance, with respect to a reference plane (PREF), of a point of light (Pi) of an object (O). The device comprises a two-dimensional detector (30) comprising a detection plane (PDET) and an imaging system (10) capable of forming an image of a point of light (Pi) situated on an object plane of interest (11) in an image plane (11') arranged close to the detection plane (PDET) or to a conjugate plane (P'DET) of the detection plane. The device further comprises a separator element (20) able to form, from a beam emitted by a point of light of the object plane of interest (11) and emerging from the imaging system (10), at least two mutually coherent beams, having a region of special superposition in which the beams interfere, and signal processing means (50) able to determine, from the interference pattern formed in the detection plane and resulting from the optical interference between said mutually coherent beams, the distance from the point of light to the conjugate plane of the detection plane in the object space of the imaging system (10), said conjugate plane of the detection plane forming the reference plane (PREF).
IPC 8 full level
G01B 9/04 (2006.01); G01B 9/02 (2006.01); G02B 21/00 (2006.01)
CPC (source: EP US)
G01B 9/02098 (2013.01 - EP US); G01B 9/04 (2013.01 - EP US); G01B 11/14 (2013.01 - US); G01N 15/1433 (2024.01 - US); G02B 21/0056 (2013.01 - EP US); G02B 21/0076 (2013.01 - EP US); G02B 21/008 (2013.01 - US); G01B 2290/30 (2013.01 - EP US); G01N 15/01 (2024.01 - US); G01N 2015/1006 (2013.01 - US)
Citation (search report)
See references of WO 2016050460A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016050460 A1 20160407; CA 2963297 A1 20160407; EP 3201563 A1 20170809; FR 3026836 A1 20160408; FR 3026836 B1 20220422; JP 2017533445 A 20171109; JP 6667539 B2 20200318; US 10012495 B2 20180703; US 2017299375 A1 20171019
DOCDB simple family (application)
EP 2015070503 W 20150908; CA 2963297 A 20150908; EP 15771517 A 20150908; FR 1459500 A 20141003; JP 2017537010 A 20150908; US 201515516254 A 20150908