EP 3209810 A1 20170830 - EVAPORATION CRUCIBLE
Title (en)
EVAPORATION CRUCIBLE
Title (de)
VERDAMPUNGSTIEGEL
Title (fr)
CREUSET DE VAPORISATION
Publication
Application
Priority
- DE 102014221561 A 20141023
- EP 2015074569 W 20151023
Abstract (en)
[origin: WO2016062845A1] The invention relates to a device for receiving evaporation material, said device (1) comprising a receiving part (2) with a receiving volume (3), the device (1) having a head part (4) with an outlet opening (5), the receiving part (2) having a threaded portion (6) for mechanical connection to the head part (4), the head part (4) having a corresponding threaded section (7) for mechanical connection to the receiving part (2). According to the invention, the receiving part (2) is formed from pyrolytic boron nitride. The invention also relates to a method for producing such a device (1).
IPC 8 full level
C23C 14/24 (2006.01)
CPC (source: CN EP)
C23C 14/243 (2013.01 - CN EP)
Citation (search report)
See references of WO 2016062845A1
Citation (examination)
JP S63190163 A 19880805 - SUMITOMO ELECTRIC INDUSTRIES
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102014221561 A1 20160428; CN 107109627 A 20170829; EP 3209810 A1 20170830; WO 2016062845 A1 20160428
DOCDB simple family (application)
DE 102014221561 A 20141023; CN 201580070840 A 20151023; EP 15784684 A 20151023; EP 2015074569 W 20151023