EP 3211409 B1 20210616 - INTEGRATED CAPACITIVE HUMIDITY SENSOR
Title (en)
INTEGRATED CAPACITIVE HUMIDITY SENSOR
Title (de)
INTEGRIERTER KAPAZITIVER FEUCHTESENSOR
Title (fr)
CAPTEUR D'HUMIDITE CAPACITIF INTEGRE
Publication
Application
Priority
US 201615053456 A 20160225
Abstract (en)
[origin: EP3211409A1] A semiconductor device composed of a capacitive humidity sensor comprised of a moisture-sensitive polymer layer electrografted to an electrically conductive metal layer situated on an CMOS substrate or a combined MEMS and CMOS substrate, and exposed within an opening through a passivation layer, packages composed of the encapsulated device, and methods of forming the capacitive humidity sensor within the semiconductor device, are provided.
IPC 8 full level
G01N 27/22 (2006.01)
CPC (source: CN EP US)
B81B 7/008 (2013.01 - US); B81C 1/00246 (2013.01 - US); G01N 27/223 (2013.01 - EP US); G01N 27/225 (2013.01 - CN); G01N 27/227 (2013.01 - CN); H01L 21/8238 (2013.01 - CN); B81B 2201/0214 (2013.01 - US); B81B 2207/015 (2013.01 - US); B81B 2207/07 (2013.01 - US); B81C 2201/0159 (2013.01 - US); B81C 2201/016 (2013.01 - US); B81C 2201/019 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3211409 A1 20170830; EP 3211409 B1 20210616; CN 107121461 A 20170901; CN 107121461 B 20210924; US 10336606 B2 20190702; US 2017247247 A1 20170831
DOCDB simple family (application)
EP 17154932 A 20170207; CN 201710105978 A 20170224; US 201615053456 A 20160225