EP 3218302 A1 20170920 - METHOD FOR MANUFACTURING AN ELECTROMECHANICAL DEVICE AND CORRESPONDING DEVICE
Title (en)
METHOD FOR MANUFACTURING AN ELECTROMECHANICAL DEVICE AND CORRESPONDING DEVICE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER ELEKTROMECHANISCHEN VORRICHTUNG SOWIE ENTSPRECHENDE VORRICHTUNG
Title (fr)
PROCEDE DE FABRICATION D'UN DISPOSITIF ELECTROMECANIQUE ET DISPOSITIF CORRESPONDANT
Publication
Application
Priority
- FR 1460871 A 20141110
- EP 2015076110 W 20151109
Abstract (en)
[origin: WO2016075098A1] The invention relates to an electromechanical device characterised in that it comprises a stack made up of an insulating layer (31) inserted between two solid layers (10, 30), and a micromechanical structure (60, 61) with predetermined thickness suspended above a recess (4) with predetermined depth, the recess (4) and the micromechanical structure (60, 61) making up one of the two solid layers (10, 30) of the stack, and the insulating layer (31) making up the bottom of said recess (4).
IPC 8 full level
B81C 1/00 (2006.01); B81C 99/00 (2010.01)
CPC (source: CN EP KR US)
B81B 3/0051 (2013.01 - CN EP KR US); B81C 1/00182 (2013.01 - US); B81C 1/00333 (2013.01 - CN EP KR US); G01L 9/0042 (2013.01 - US); B81C 2201/0194 (2013.01 - CN EP KR US); B81C 2203/051 (2013.01 - CN EP KR US)
Citation (search report)
See references of WO 2016075098A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3028257 A1 20160513; CN 107074531 A 20170818; EP 3218302 A1 20170920; JP 2018500186 A 20180111; JP 6305647 B2 20180404; KR 101847793 B1 20180528; KR 20170086483 A 20170726; US 2017305739 A1 20171026; US 9944512 B2 20180417; WO 2016075098 A1 20160519
DOCDB simple family (application)
FR 1460871 A 20141110; CN 201580056216 A 20151109; EP 15791617 A 20151109; EP 2015076110 W 20151109; JP 2017522962 A 20151109; KR 20177011711 A 20151109; US 201515520618 A 20151109