EP 3221064 B1 20180926 - VERTICAL GAP ACTUATOR FOR ULTRASONIC TRANSDUCERS AND FABRICATION OF THE SAME
Title (en)
VERTICAL GAP ACTUATOR FOR ULTRASONIC TRANSDUCERS AND FABRICATION OF THE SAME
Title (de)
STELLANTRIEB MIT VERTIKALEM ABSTAND FÜR ULTRASCHALLWANDLER UND HERSTELLUNG DAVON
Title (fr)
ACTIONNEUR AVEC INTERVALLE VERTICAL POUR TRANSDUCTEURS ULTRASONORES ET FABRICATION CORRESPONDANTE
Publication
Application
Priority
- TR 201413718 A 20141119
- TR 2015050097 W 20150909
Abstract (en)
[origin: WO2016080931A1] The invention is related to the capacitive micromachined ultrasonic transducers (CMUT) actuated electrostatically.
IPC 8 full level
B06B 1/02 (2006.01)
CPC (source: EP)
B06B 1/0292 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2016080931 A1 20160526; EP 3221064 A1 20170927; EP 3221064 B1 20180926
DOCDB simple family (application)
TR 2015050097 W 20150909; EP 15784792 A 20150909