Global Patent Index - EP 3221064 B1

EP 3221064 B1 20180926 - VERTICAL GAP ACTUATOR FOR ULTRASONIC TRANSDUCERS AND FABRICATION OF THE SAME

Title (en)

VERTICAL GAP ACTUATOR FOR ULTRASONIC TRANSDUCERS AND FABRICATION OF THE SAME

Title (de)

STELLANTRIEB MIT VERTIKALEM ABSTAND FÜR ULTRASCHALLWANDLER UND HERSTELLUNG DAVON

Title (fr)

ACTIONNEUR AVEC INTERVALLE VERTICAL POUR TRANSDUCTEURS ULTRASONORES ET FABRICATION CORRESPONDANTE

Publication

EP 3221064 B1 20180926 (EN)

Application

EP 15784792 A 20150909

Priority

  • TR 201413718 A 20141119
  • TR 2015050097 W 20150909

Abstract (en)

[origin: WO2016080931A1] The invention is related to the capacitive micromachined ultrasonic transducers (CMUT) actuated electrostatically.

IPC 8 full level

B06B 1/02 (2006.01)

CPC (source: EP)

B06B 1/0292 (2013.01)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DOCDB simple family (publication)

WO 2016080931 A1 20160526; EP 3221064 A1 20170927; EP 3221064 B1 20180926

DOCDB simple family (application)

TR 2015050097 W 20150909; EP 15784792 A 20150909