EP 3223993 A2 20171004 - SEPARATION OF A SOLID BODY BY MATERIAL MODIFICATION
Title (en)
SEPARATION OF A SOLID BODY BY MATERIAL MODIFICATION
Title (de)
FESTKÖRPERTEILUNG MITTELS STOFFUMWANDLUNG
Title (fr)
SÉPARATION D'UN CORPS SOLIDE PAR MODIFICATION DU MATÉRIAU
Publication
Application
Priority
- DE 102014017583 A 20141127
- DE 102014017582 A 20141127
- DE 102014018720 A 20141217
- DE 102014018841 A 20141217
- DE 102015000449 A 20150115
- EP 2015077981 W 20151127
Abstract (en)
[origin: WO2016083610A2] The invention relates to a method for creating a detachment zone (2) in a solid (1) in order to detach a solid portion (12), especially a solid layer (12), from the solid (1), said solid portion (12) that is to be detached being thinner than the solid from which the solid portion (12) has been removed. According to the invention, the method comprises at least the steps of: providing a solid (1) which is to be processed and which is preferably made of a chemical compound; providing a LASER light source; subjecting the solid (1) to LASER radiation from the LASER light source so that the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) that is to be cut off; the LASER radiation is applied in a defined manner to a predefined portion of the solid (1) inside the solid (1) such that a detachment zone (2) or a plurality of partial detachment zones (25, 27, 28, 29) is formed; the method is characterized in that a number of modifications (9) is successively created in the crystal lattice by the applied laser radiation, and the crystal lattice fissures at least partially in the regions surrounding the modifications (9) as a result of the modifications (9), said fissures in the region of the modifications (9) predefining the detachment zone (2) or a plurality of partial detachment zones (25, 27, 28, 29).
IPC 8 full level
H01L 21/78 (2006.01); B23K 26/40 (2014.01); B23K 26/53 (2014.01); B28D 5/00 (2006.01); H01L 21/02 (2006.01); B23K 103/00 (2006.01)
CPC (source: CN EP KR US)
B23K 26/0622 (2015.10 - KR); B23K 26/082 (2015.10 - KR); B23K 26/0876 (2013.01 - KR); B23K 26/40 (2013.01 - US); B23K 26/402 (2013.01 - CN US); B23K 26/53 (2015.10 - CN EP KR US); B28D 5/0011 (2013.01 - US); H01L 21/02019 (2013.01 - US); H01L 21/3043 (2013.01 - CN US); H01L 21/78 (2013.01 - EP US); B23K 2103/50 (2018.07 - EP US); B23K 2103/56 (2018.07 - EP KR US)
Citation (search report)
See references of WO 2016083610A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016083610 A2 20160602; WO 2016083610 A3 20160922; CN 107107260 A 20170829; CN 107107260 B 20220211; CN 108838562 A 20181120; CN 108838562 B 20210817; CN 108857049 A 20181123; EP 3223993 A2 20171004; EP 3395489 A1 20181031; EP 3395489 B1 20240619; EP 3399542 A1 20181107; EP 3399542 B1 20230412; EP 3666445 A1 20200617; EP 3666445 B1 20221019; EP 4122633 A1 20230125; JP 2017526161 A 20170907; JP 2018152582 A 20180927; JP 6396505 B2 20180926; JP 6748144 B2 20200826; KR 101864558 B1 20180604; KR 102587022 B1 20231010; KR 20170086644 A 20170726; KR 20180059569 A 20180604; KR 20200006641 A 20200120; KR 20220058670 A 20220509; KR 20230145246 A 20231017; MY 174094 A 20200309; SG 11201704275U A 20170629; US 11407066 B2 20220809; US 11833617 B2 20231205; US 2018126484 A1 20180510; US 2018290232 A1 20181011; US 2024058899 A1 20240222
DOCDB simple family (application)
EP 2015077981 W 20151127; CN 201580064710 A 20151127; CN 201810563830 A 20151127; CN 201810564712 A 20151127; EP 15801449 A 20151127; EP 18175761 A 20151127; EP 18178276 A 20151127; EP 20151833 A 20151127; EP 22195120 A 20151127; JP 2016570350 A 20151127; JP 2018090077 A 20180508; KR 20177017549 A 20151127; KR 20187014524 A 20151127; KR 20207001035 A 20151127; KR 20227014422 A 20151127; KR 20237033908 A 20151127; MY PI2017701927 A 20151127; SG 11201704275U A 20151127; US 201515531329 A 20151127; US 201816003221 A 20180608; US 202318499716 A 20231101