Global Patent Index - EP 3227898 A1

EP 3227898 A1 2017-10-11 - MICROELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING THE SAME

Title (en)

MICROELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING THE SAME

Title (de)

MEMS UND METHODE ZUR HERSTELLUNG DES MEMS

Title (fr)

MEMS ET MÉTHODE DE SA PRODUCTION

Publication

EP 3227898 A1 (EN)

Application

EP 14808601 A

Priority

EP 2014076609 W

Abstract (en)

[origin: WO2016086997A1] A MEMS comprises a stack comprising a first layer and a second layer having sides facing each other. The first layer and the second layer are attached to each other by a contact material at opposing contact regions of the sides of the first and the second layer. The contact material forms a distance between the sides of the first and the second layer. A first signal line is arranged at the side of the first layer. A second signal line is arranged at the side of the second layer. The first signal line, at a first longitudinal portion of the first signal line, laterally extends through the contact region of the first side of the first layer. The second signal line comprises a void in a void region at a location in the corresponding contact region of the side of the second layer and opposing the first signal line, The first signal line, at a second longitudinal portion of the first signal line, faces the second signal line spaced apart from the second signal line.

IPC 8 full level (invention and additional information)

H01H 59/00 (2006.01); H01H 1/00 (2006.01); H01P 1/12 (2006.01); H01P 3/02 (2006.01); H01P 3/08 (2006.01)

CPC (invention and additional information)

H01H 59/0009 (2013.01); H01P 1/127 (2013.01); H01H 2001/0078 (2013.01)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

EPO simple patent family

WO 2016086997 A1 20160609; EP 3227898 A1 20171011

INPADOC legal status


2018-03-14 [DAX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT (TO ANY COUNTRY) (DELETED)

2017-10-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20170511

2017-10-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

2017-10-11 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: BA ME