Global Patent Index - EP 3230686 A1

EP 3230686 A1 20171018 - METHOD FOR DETERMINING THE THICKNESS OF A THIN LAYER BY MULTI-WAVELENGTH INTERFEROMETRY AND CORRESPONDING COMPUTER PROGRAM PACKAGE, STORAGE MEANS AND SYSTEM

Title (en)

METHOD FOR DETERMINING THE THICKNESS OF A THIN LAYER BY MULTI-WAVELENGTH INTERFEROMETRY AND CORRESPONDING COMPUTER PROGRAM PACKAGE, STORAGE MEANS AND SYSTEM

Title (de)

VERFAHREN ZUR BESTIMMUNG DER DICKE EINER DÜNNSCHICHT DURCH MULTIWELLENLÄNGENINTERFEROMETRIE UND ZUGEHÖRIGE COMPUTERPROGRAMMPAKET, SPEICHERMITTEL UND SYSTEM

Title (fr)

PROCÉDÉ DE DÉTERMINATION DE L'ÉPAISSEUR D'UNE COUCHE MINCE PAR INTERFÉROMÉTRIE MULTI-LONGUEUR D'ONDE, PRODUIT PROGRAMME D'ORDINATEUR, MOYEN DE STOCKAGE ET SYSTÈME CORRESPONDANTS

Publication

EP 3230686 A1 20171018 (FR)

Application

EP 15807675 A 20151209

Priority

  • FR 1462287 A 20141211
  • EP 2015079178 W 20151209

Abstract (en)

[origin: WO2016091983A1] A method and system are provided for determining the thickness of a thin layer deposited on the surface of a reflective substrate, by means of a multi-wavelength device in a configuration equivalent to a Michelson interferometer. The method consists in: generating (20) an array of collimated light beams intended to illuminate the surface of the thin layer and that of the planar mirror, each beam having a distinct wavelength; occulting (21) the measurement arms, preventing the collimated light beams from being received by the object to be measured, and obtaining (22) a reference image representative of the light intensity issued from the planar mirror; occulting (23) the reference arm, preventing the collimated light beams from being received by the planar mirror, and obtaining (24) a measurement image representative of the light intensity issued from the object to be measured; and determining (25) the thickness of the thin layer from the measurement and reference images obtained.

IPC 8 full level

G01B 11/06 (2006.01)

CPC (source: EP)

G01B 11/0633 (2013.01)

Citation (search report)

See references of WO 2016091983A1

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

WO 2016091983 A1 20160616; EP 3230686 A1 20171018; FR 3030032 A1 20160617; FR 3030032 B1 20200710

DOCDB simple family (application)

EP 2015079178 W 20151209; EP 15807675 A 20151209; FR 1462287 A 20141211