EP 3233728 A1 20171025 - METHOD FOR PRODUCING CHLORINATED OLIGOSILANES
Title (en)
METHOD FOR PRODUCING CHLORINATED OLIGOSILANES
Title (de)
VERFAHREN ZUR HERSTELLUNG VON CHLORIERTEN OLIGOSILANEN
Title (fr)
PROCÉDÉ DE PRODUCTION D'OLIGOSILANES CHLORÉS
Publication
Application
Priority
EP 2014077814 W 20141215
Abstract (en)
[origin: WO2016095953A1] The present invention relates to a method for producing chlorinated oligosilanes, chlorinated polysilane having an empirical formula of SiCl1.0-2.8 and/or a mixture containing the chlorinated polysilane being reacted with elementary chlorine or a chlorine-containing mixture. The invention further relates to the chlorinated oligosilanes produced by said method and to the use thereof for the manufacture of semiconductors and/or hard coatings.
IPC 8 full level
C01B 33/107 (2006.01); C08G 77/00 (2006.01)
CPC (source: EP US)
B01D 3/009 (2013.01 - US); C01B 33/107 (2013.01 - EP US); C01B 33/10715 (2013.01 - EP US); C01B 33/10773 (2013.01 - EP US); C01B 33/10778 (2013.01 - EP US); C08G 77/60 (2013.01 - EP US); C09D 1/00 (2013.01 - US); H01L 21/02123 (2013.01 - US)
Citation (search report)
See references of WO 2016095953A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016095953 A1 20160623; EP 3233728 A1 20171025; JP 2018502817 A 20180201; US 2017334730 A1 20171123
DOCDB simple family (application)
EP 2014077814 W 20141215; EP 14815659 A 20141215; JP 2017549580 A 20141215; US 201415535960 A 20141215