Global Patent Index - EP 3237841 A1

EP 3237841 A1 20171101 - METHOD FOR EXAMINING OBJECT PROPERTIES OF AN OBJECT IN A SUBSTRATE

Title (en)

METHOD FOR EXAMINING OBJECT PROPERTIES OF AN OBJECT IN A SUBSTRATE

Title (de)

VERFAHREN ZUM ÜBERPRÜFEN VON OBJEKTEIGENSCHAFTEN EINES OBJEKTES IN EINEM UNTERGRUND

Title (fr)

PROCÉDÉ POUR CONTRÔLER DES PROPRIÉTÉS D'UN OBJET SITUÉ DANS UN SOUS-SOL

Publication

EP 3237841 A1 20171101 (DE)

Application

EP 15813875 A 20151222

Priority

  • EP 14200036 A 20141223
  • EP 2015080974 W 20151222

Abstract (en)

[origin: WO2016102564A1] The invention relates to a method for examining object properties of an object (23, 25) in a substrate (18), using an arrangement (10) that comprises a detector device (11), a localisation device (12) and a control device (13), in which: - in a first step, a first object having first object properties to be examined and first target coordinates is selected, - in a second step an actual position of the detector device (11) is determined using the localisation device (12), - in a third step an actual detection field is determined from the actual position of the detector device (11), by means of the control device (13) and - in a fourth step, the first target coordinates are compared with the actual detection field of the detector device (11), by said control device (13).

IPC 8 full level

G01C 15/00 (2006.01); G01V 3/15 (2006.01)

CPC (source: CN EP RU US)

G01B 11/002 (2013.01 - US); G01C 3/06 (2013.01 - US); G01C 15/00 (2013.01 - RU); G01C 15/002 (2013.01 - CN EP US); G01C 15/006 (2013.01 - US); G01V 3/15 (2013.01 - CN EP US)

Citation (examination)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

EP 3037778 A1 20160629; CN 107278273 A 20171020; EP 3237841 A1 20171101; JP 2018506028 A 20180301; JP 6762301 B2 20200930; RU 2673368 C1 20181126; US 10502566 B2 20191210; US 2017370721 A1 20171228; WO 2016102564 A1 20160630

DOCDB simple family (application)

EP 14200036 A 20141223; CN 201580076850 A 20151222; EP 15813875 A 20151222; EP 2015080974 W 20151222; JP 2017533950 A 20151222; RU 2017126245 A 20151222; US 201515539023 A 20151222