EP 3240013 B1 20181107 - THREE-DIMENSIONAL IMAGING IN CHARGED-PARTICLE MICROSCOPY
Title (en)
THREE-DIMENSIONAL IMAGING IN CHARGED-PARTICLE MICROSCOPY
Title (de)
DREIDIMENSIONALE ABBILDUNG IN DER LADUNGSTRÄGERMIKROSKOPIE
Title (fr)
IMAGERIE TRIDIMENSIONNELLE DANS LA MICROSCOPIE À PARTICULES CHARGÉES
Publication
Application
Priority
EP 16166998 A 20160426
Abstract (en)
[origin: EP3240013A1] A method of investigating a specimen using charged-particle microscopy, comprising the following steps: (a) On a surface of the specimen, selecting a virtual sampling grid extending in an XY plane and comprising grid nodes to be impinged upon by a charged-particle probing beam during a two-dimensional scan of said surface; (b) Selecting a landing energy E i for said probing beam, with an associated nominal Z penetration depth d i below said surface; (c) At each of said nodes, irradiating the specimen with said probing beam and detecting output radiation emanating from the specimen in response thereto, thereby generating a scan image l i ; (d) Repeating steps (b) and (c) for a series {E i } of different landing energies, corresponding to an associated series {d i } of different penetration depths, further comprising the following steps: (e) Pre-selecting an initial energy increment ”E i by which E i is to be altered after a first iteration of steps (b) and (c); (f) Associating energy increment ”E i with a corresponding depth increment ”d in the value of d i ; (g) Selecting said sampling grid to have a substantially equal node pitch p in X and Y, which pitch p is matched to the value of ”d so as to produce a substantially cubic sampling voxel; (h) Selecting subsequent energy values in the series {E i } so as to maintain a substantially constant depth increment ”d between consecutive members of the series {d i }, within the bounds of selected minimum and maximum landing energies E min and E max , respectively.
IPC 8 full level
H01J 37/22 (2006.01); H01J 37/28 (2006.01); G01N 23/22 (2018.01)
CPC (source: CN EP US)
G01N 23/225 (2013.01 - EP US); H01J 37/20 (2013.01 - US); H01J 37/222 (2013.01 - EP US); H01J 37/244 (2013.01 - CN US); H01J 37/28 (2013.01 - CN EP US); G01N 2223/079 (2013.01 - EP US); G01N 2223/08 (2013.01 - EP US); G01N 2223/423 (2013.01 - EP US); H01J 2237/226 (2013.01 - EP US); H01J 2237/244 (2013.01 - CN); H01J 2237/2803 (2013.01 - CN); H01J 2237/2813 (2013.01 - CN)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3240013 A1 20171101; EP 3240013 B1 20181107; CN 107316793 A 20171103; CN 107316793 B 20200214; JP 2017198657 A 20171102; JP 6932004 B2 20210908; US 10128080 B2 20181113; US 2017309448 A1 20171026
DOCDB simple family (application)
EP 16166998 A 20160426; CN 201710099178 A 20170223; JP 2017027417 A 20170217; US 201715413216 A 20170123