EP 3245663 A1 20171122 - SAMPLE HOLDER FOR USE IN BOTH A LIGHT OPTICAL MICROSCOPE AND A CHARGED PARTICLE MICROSCOPE
Title (en)
SAMPLE HOLDER FOR USE IN BOTH A LIGHT OPTICAL MICROSCOPE AND A CHARGED PARTICLE MICROSCOPE
Title (de)
PROBENTRÄGER ZUR VERWENDUNG IN EINEM OPTISCHEN LICHTMIKROSKOP UND LADUNGSTRÄGERTEILCHENMIKROSKOP
Title (fr)
PORTE-ÉCHANTILLON DESTINÉ À ÊTRE UTILISÉ DANS UN MICROSCOPE OPTIQUE ET DANS UN MICROSCOPE À PARTICULES CHARGÉES
Publication
Application
Priority
- NL 2014110 A 20150112
- NL 2016050022 W 20160112
Abstract (en)
[origin: WO2016114656A1] The invention relates to a sample holder for holding a sample, or to a sample arranged on said sample holder, for inspecting said sample with both a light optical microscope and a charged particle microscope. The sample holder comprises a substrate (51) having a first side which is provided with a conductive layer (53), wherein said substrate and said conductive layer are at least substantially optically transparent. Also the sample is arranged at the first side of the substrate, in particular at a side of the conductive layer facing away from the substrate. Between the conductive layer and the sample a spacing layer (60) of a predetermined thickness is provided. Said spacing layer is substantially electrically insulating and at least substantially optically transparent.
IPC 8 full level
H01J 37/20 (2006.01); H01J 37/22 (2006.01)
CPC (source: EP)
G02B 21/34 (2013.01); H01J 37/20 (2013.01); H01J 37/22 (2013.01); H01J 2237/28 (2013.01)
Citation (search report)
See references of WO 2016114656A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
NL 2016050022 W 20160112; EP 16710017 A 20160112