EP 3247747 A1 20171129 - METHOD FOR IMPROVING THE CRITICAL DIMENSION UNIFORMITY OF ORDERED FILMS OF BLOCK COPOLYMERS
Title (en)
METHOD FOR IMPROVING THE CRITICAL DIMENSION UNIFORMITY OF ORDERED FILMS OF BLOCK COPOLYMERS
Title (de)
VERFAHREN ZUR VERBESSERUNG DER GLEICHFÖRMIGKEIT KRITISCHER ABMESSUNGEN VON GEORDNETEN FOLIEN AUS BLOCKCOPOLYMEREN
Title (fr)
PROCÉDÉ D'AMÉLIORATION DE L'UNIFORMITÉ DE DIMENSION CRITIQUE DE FILMS ORDONNÉS DE COPOLYMÈRES À BLOCS
Publication
Application
Priority
- FR 1550466 A 20150121
- FR 2016050113 W 20160121
Abstract (en)
[origin: WO2016116705A1] The invention relates to a method for monitoring the critical dimension uniformity of ordered films of block copolymers on the nanometric scale. The invention also relates to the compositions used to monitor the critical dimension uniformity of ordered films of block copolymers and the ordered films thus obtained, which can be used in particular as masks in the field of lithography.
IPC 8 full level
C08L 53/00 (2006.01); G03F 7/00 (2006.01)
CPC (source: CN EP KR US)
B05D 1/005 (2013.01 - US); B05D 3/0254 (2013.01 - US); C08F 212/08 (2013.01 - CN); C08F 220/14 (2013.01 - CN); C08F 297/02 (2013.01 - CN); C08J 5/18 (2013.01 - CN); C08L 53/00 (2013.01 - CN EP KR US); C09D 153/00 (2013.01 - CN US); G03F 1/68 (2013.01 - CN US); G03F 7/0002 (2013.01 - EP KR US); G03F 7/004 (2013.01 - CN KR); G03F 7/162 (2013.01 - US); G03F 7/168 (2013.01 - US); C08J 2353/00 (2013.01 - CN); C08J 2453/00 (2013.01 - CN); C08L 2203/16 (2013.01 - CN); C08L 2205/02 (2013.01 - US); C08L 2205/025 (2013.01 - CN)
Citation (search report)
See references of WO 2016116705A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3031749 A1 20160722; FR 3031749 B1 20180928; CN 107406660 A 20171128; EP 3247747 A1 20171129; JP 2018506183 A 20180301; KR 20170118744 A 20171025; SG 11201705896U A 20170830; TW 201700593 A 20170101; TW I598395 B 20170911; US 2018203348 A1 20180719; US 2020057368 A1 20200220; WO 2016116705 A1 20160728
DOCDB simple family (application)
FR 1550466 A 20150121; CN 201680017108 A 20160121; EP 16703591 A 20160121; FR 2016050113 W 20160121; JP 2017537908 A 20160121; KR 20177023124 A 20160121; SG 11201705896U A 20160121; TW 105101872 A 20160121; US 201615545068 A 20160121; US 201916656103 A 20191017