EP 3248062 A1 20171129 - METHOD FOR REDUCING DEFECTS IN AN ORDERED FILM MADE OF BLOCK COPOLYMER
Title (en)
METHOD FOR REDUCING DEFECTS IN AN ORDERED FILM MADE OF BLOCK COPOLYMER
Title (de)
METHODE ZUR VERRINGERUNG VON MÄNGELN BEI EINER ANGEORDNETEN FOLIE AUS BLOCKCOPOLYMER
Title (fr)
PROCÉDÉ DE RÉDUCTION DES DÉFAUTS DANS UN FILM ORDONNÉ DE COPOLYMÈRE A BLOCS
Publication
Application
Priority
- FR 1550470 A 20150121
- FR 2016050115 W 20160121
Abstract (en)
[origin: WO2016116707A1] The invention relates to a method for reducing the number of defects in an ordered film comprising a block copolymer (BCP). The invention also relates to the compositions used to produce said ordered films, and to the ordered films thus produced which can be used in particular as masks in the field of lithography.
IPC 8 full level
G03F 7/00 (2006.01)
CPC (source: EP KR US)
C08G 81/021 (2013.01 - US); C08L 53/00 (2013.01 - KR); G03F 1/72 (2013.01 - US); G03F 7/0002 (2013.01 - EP KR US); G03F 7/004 (2013.01 - KR)
Citation (search report)
See references of WO 2016116707A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3031751 A1 20160722; FR 3031751 B1 20181005; CN 107430332 A 20171201; EP 3248062 A1 20171129; JP 2018502967 A 20180201; JP 6588555 B2 20191009; KR 20170118742 A 20171025; SG 11201706000R A 20170830; TW 201708288 A 20170301; US 2018011399 A1 20180111; WO 2016116707 A1 20160728
DOCDB simple family (application)
FR 1550470 A 20150121; CN 201680017316 A 20160121; EP 16703349 A 20160121; FR 2016050115 W 20160121; JP 2017537909 A 20160121; KR 20177023115 A 20160121; SG 11201706000R A 20160121; TW 105101874 A 20160121; US 201615545113 A 20160121