EP 3248064 A1 20171129 - METHOD FOR REDUCING THE ASSEMBLY TIME OF ORDERED FILMS MADE OF BLOCK COPOLYMER
Title (en)
METHOD FOR REDUCING THE ASSEMBLY TIME OF ORDERED FILMS MADE OF BLOCK COPOLYMER
Title (de)
VERFAHREN ZUR REDUZIERUNG DER MONTAGEZEIT VON GEORDNETEN, AUS BLOCKCOPOLYMER HERGESTELLTEN FOLIEN
Title (fr)
PROCÉDÉ DE RÉDUCTION DU TEMPS D'ASSEMBLAGE DES FILMS ORDONNES DE COPOLYMÈRE A BLOCS
Publication
Application
Priority
- FR 1550463 A 20150121
- FR 2016050116 W 20160121
Abstract (en)
[origin: WO2016116708A1] The invention relates to a method for reducing the assembly time comprising a block copolymer (BCP). The invention also relates to the compositions used to produce said ordered films, and to the ordered films thus produced which can be used in particular as masks in the field of lithography.
IPC 8 full level
G03F 7/00 (2006.01)
CPC (source: CN EP KR US)
B29C 41/003 (2013.01 - US); B29C 41/46 (2013.01 - US); C08J 5/18 (2013.01 - US); C08L 53/00 (2013.01 - KR); G03F 1/50 (2013.01 - US); G03F 7/0002 (2013.01 - CN EP KR US); G03F 7/004 (2013.01 - KR); B29K 2105/0085 (2013.01 - US); B29L 2011/00 (2013.01 - US); C08J 2353/00 (2013.01 - US); C08J 2453/00 (2013.01 - US)
Citation (search report)
See references of WO 2016116708A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3031748 A1 20160722; FR 3031748 B1 20180928; CN 107430330 A 20171201; EP 3248064 A1 20171129; JP 2018505275 A 20180222; KR 20170118743 A 20171025; SG 11201705897Y A 20170830; TW 201641581 A 20161201; TW I631170 B 20180801; US 2018015645 A1 20180118; WO 2016116708 A1 20160728
DOCDB simple family (application)
FR 1550463 A 20150121; CN 201680017300 A 20160121; EP 16703593 A 20160121; FR 2016050116 W 20160121; JP 2017537916 A 20160121; KR 20177023117 A 20160121; SG 11201705897Y A 20160121; TW 105101875 A 20160121; US 201615545134 A 20160121