EP 3253183 B1 20231108 - ATMOSPHERIC-PRESSURE PLASMA GENERATION DEVICE
Title (en)
ATMOSPHERIC-PRESSURE PLASMA GENERATION DEVICE
Title (de)
ATMOSPHÄHRENDRUCK-PLASMAERZEUGUNGSVORRICHTUNG
Title (fr)
DISPOSITIF DE GÉNÉRATION DE PLASMA SOUS PRESSION ATMOSPHÉRIQUE
Publication
Application
Priority
JP 2015052191 W 20150127
Abstract (en)
[origin: EP3253183A1] Atmospheric pressure plasma generator 20 includes: tubular outer tube 20; inner tube 22, with an outer diameter smaller than an inner diameter of the outer tube, that is inserted inside the outer tube, the inner tube being formed from a material with either positive or negative electrical polarity; and electrode 26 with electrical polarity opposite to that of the material of the inner tube, the electrode being provided on an outer circumferential surface of the outer tube, wherein, in a state with processing gas flowing in at least one of a first flow path inside the inner tube and a second flow path between an outer circumferential surface of the inner tube and an inner circumferential surface of the outer tube, processing gas flowing through the at least one of the first flow path and the second flow path is plasmarized by applying an electric current to the electrode.
IPC 8 full level
H05H 1/24 (2006.01)
CPC (source: EP US)
H05H 1/2406 (2013.01 - EP US); H05H 1/2443 (2021.05 - EP); H05H 1/246 (2021.05 - EP); H05H 1/2465 (2021.05 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3253183 A1 20171206; EP 3253183 A4 20180926; EP 3253183 B1 20231108; JP 6425742 B2 20181121; JP WO2016120998 A1 20171102; WO 2016120998 A1 20160804
DOCDB simple family (application)
EP 15879895 A 20150127; JP 2015052191 W 20150127; JP 2016571548 A 20150127