EP 3268979 A1 20180117 - APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Title (en)
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Title (de)
VORRICHTUNG MIT MEHREREN GELADENEN TEILCHENSTRAHLEN
Title (fr)
APPAREIL AYANT PLUSIEURS FAISCEAUX DE PARTICULES CHARGÉES
Publication
Application
Priority
US 2016027267 W 20160413
Abstract (en)
[origin: WO2016145458A1] A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.
IPC 8 full level
H01J 49/00 (2006.01); G01N 23/00 (2006.01); G21K 5/10 (2006.01); G21K 7/00 (2006.01)
CPC (source: EP US)
H01J 37/12 (2013.01 - US); H01J 37/1472 (2013.01 - EP US); H01J 37/28 (2013.01 - EP US); H01J 2237/04924 (2013.01 - EP US); H01J 2237/083 (2013.01 - EP US); H01J 2237/1205 (2013.01 - EP US); H01J 2237/1516 (2013.01 - EP US); H01J 2237/2817 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016145458 A1 20160915; CN 108292583 A 20180717; CN 108292583 B 20200320; EP 3268979 A1 20180117; EP 3268979 A4 20190508; JP 2018513543 A 20180524; JP 6550478 B2 20190724
DOCDB simple family (application)
US 2016027267 W 20160413; CN 201680026508 A 20160413; EP 16762718 A 20160413; JP 2017567053 A 20160413