EP 3281220 A1 20180214 - SUBSTRATE HOLDER AND METHOD FOR BONDING TWO SUBSTRATES
Title (en)
SUBSTRATE HOLDER AND METHOD FOR BONDING TWO SUBSTRATES
Title (de)
SUBSTRATHALTER UND VERFAHREN ZUM BONDEN ZWEIER SUBSTRATE
Title (fr)
DISPOSITIF ET PROCÉDÉ POUR RELIER DEUX SUBSTRATS
Publication
Application
Priority
EP 2015057859 W 20150410
Abstract (en)
[origin: WO2016162088A1] The invention relates to a substrate holder (1, 1', 1", 1'", 1IV), comprising a fixing surface (4o) for holding a substrate (11, 11').
IPC 8 full level
H01L 21/67 (2006.01)
CPC (source: EP KR US)
H01L 21/187 (2013.01 - KR); H01L 21/67092 (2013.01 - EP KR US); H01L 21/67109 (2013.01 - EP KR US); H01L 21/67346 (2013.01 - US); H01L 21/68 (2013.01 - US); H01L 24/80 (2013.01 - US)
Citation (examination)
JP 2005302858 A 20051027 - NIKON CORP
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016162088 A1 20161013; CN 107533996 A 20180102; CN 107533996 B 20210223; EP 3281220 A1 20180214; JP 2018515908 A 20180614; KR 102298898 B1 20210907; KR 20170137050 A 20171212; KR 20200059324 A 20200528; SG 11201706844Q A 20171030; TW 201642386 A 20161201; TW 201923962 A 20190616; TW I647786 B 20190111; TW I683393 B 20200121; US 11315813 B2 20220426; US 2018040495 A1 20180208
DOCDB simple family (application)
EP 2015057859 W 20150410; CN 201580077827 A 20150410; EP 15717136 A 20150410; JP 2017547970 A 20150410; KR 20177024926 A 20150410; KR 20207014509 A 20150410; SG 11201706844Q A 20150410; TW 105109074 A 20160323; TW 107141955 A 20160323; US 201515551733 A 20150410