EP 3286434 A1 20180228 - VALVE DEVICE AND METHOD FOR OPERATING THE VALVE DEVICE
Title (en)
VALVE DEVICE AND METHOD FOR OPERATING THE VALVE DEVICE
Title (de)
VENTILEINRICHTUNG UND VERFAHREN ZUM BETRIEB DER VENTILEINRICHTUNG
Title (fr)
DISPOSITIF À VANNE ET PROCÉDÉ POUR FAIRE FONCTIONNER UN DISPOSITIF À VANNE
Publication
Application
Priority
- DE 102015106279 A 20150423
- EP 2016058912 W 20160421
Abstract (en)
[origin: WO2016170065A1] The invention relates to a valve device (1) for connecting a vacuum pump (5) to a vacuum pipework (4) of a clean room having an inlet connector (2) and an outlet connector (3), and to a method for operating the valve device, wherein a main connection (6) is configured between the inlet connector (2) and the outlet connector (3), in which main connection (6) a main valve (7) is arranged. A bypass connection (8) is configured parallel to the main valve (7), in which bypass connection (8) a first auxiliary valve (10) is arranged. In order for it to be possible to monitor functioning of the vacuum pump in as simple a manner as possible, a measuring point (12) is configured in the bypass connection (8) downstream of the first auxiliary valve (10) in the flow direction.
IPC 8 full level
F04B 37/14 (2006.01); F04B 49/24 (2006.01); F04B 51/00 (2006.01)
CPC (source: EP)
F04B 37/14 (2013.01); F04B 49/24 (2013.01); F04B 2205/01 (2013.01)
Citation (search report)
See references of WO 2016170065A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016170065 A1 20161027; DE 102015106279 A1 20161027; EP 3286434 A1 20180228
DOCDB simple family (application)
EP 2016058912 W 20160421; DE 102015106279 A 20150423; EP 16721710 A 20160421