EP 3286781 A1 20180228 - SERVICE CART
Title (en)
SERVICE CART
Title (de)
SERVICEEINRICHTUNG
Title (fr)
DISPOSITIF D'ENTRETIEN
Publication
Application
Priority
- EP 15164605 A 20150422
- EP 2016054975 W 20160309
Abstract (en)
[origin: WO2016169694A1] The invention relates to a service cart for a clean room or for systems in the clean room comprising a system part which can be moved horizontally and vertically. Said system part is suspended on magnetic rails.
IPC 8 full level
H01L 21/677 (2006.01)
CPC (source: EP KR US)
B65G 1/026 (2013.01 - US); H01L 21/67709 (2013.01 - EP KR US); H01L 21/67733 (2013.01 - EP KR US); G03F 7/70 (2013.01 - US)
Citation (search report)
See references of WO 2016169694A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016169694 A1 20161027; EP 3286781 A1 20180228; KR 102561719 B1 20230731; KR 20170141728 A 20171226; US 2018155126 A1 20180607
DOCDB simple family (application)
EP 2016054975 W 20160309; EP 16709368 A 20160309; KR 20177033221 A 20160309; US 201615568348 A 20160309