Global Patent Index - EP 3286781 A1

EP 3286781 A1 20180228 - SERVICE CART

Title (en)

SERVICE CART

Title (de)

SERVICEEINRICHTUNG

Title (fr)

DISPOSITIF D'ENTRETIEN

Publication

EP 3286781 A1 20180228 (DE)

Application

EP 16709368 A 20160309

Priority

  • EP 15164605 A 20150422
  • EP 2016054975 W 20160309

Abstract (en)

[origin: WO2016169694A1] The invention relates to a service cart for a clean room or for systems in the clean room comprising a system part which can be moved horizontally and vertically. Said system part is suspended on magnetic rails.

IPC 8 full level

H01L 21/677 (2006.01)

CPC (source: EP KR US)

B65G 1/026 (2013.01 - US); H01L 21/67709 (2013.01 - EP KR US); H01L 21/67733 (2013.01 - EP KR US); G03F 7/70 (2013.01 - US)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

WO 2016169694 A1 20161027; EP 3286781 A1 20180228; KR 102561719 B1 20230731; KR 20170141728 A 20171226; US 2018155126 A1 20180607

DOCDB simple family (application)

EP 2016054975 W 20160309; EP 16709368 A 20160309; KR 20177033221 A 20160309; US 201615568348 A 20160309