EP 3292330 A1 20180314 - TRANSFER VALVE
Title (en)
TRANSFER VALVE
Title (de)
TRANSFERVENTIL
Title (fr)
SOUPAPE DE TRANSFERT
Publication
Application
Priority
- DE 102015106916 A 20150504
- EP 2016058697 W 20160420
Abstract (en)
[origin: WO2016177572A1] The invention relates to a transfer valve (80) for opening and closing an opening, in particular a sluice, of a clean gas chamber, wherein the opening is closed by a closure element (30) of the transfer valve in a closed position and is released in an open position. For this purpose, according to the invention, at least one first actuator and a second actuator are directly or indirectly connected to the closure element, and the first actuator is coupled to the closure element in such a way that it raises the closure element for opening the opening and/or comes into contact with same for closing, and the second actuator is coupled to the closure element in such a way that it moves the closure element in a transverse direction to the opening. The transfer valve permits the opening and closing of an opening of the clean gas chamber with small space requirements.
IPC 8 full level
F16K 3/18 (2006.01)
CPC (source: EP KR)
F16K 3/188 (2013.01 - EP KR); F16K 51/02 (2013.01 - EP KR); H01L 21/67126 (2013.01 - EP KR)
Citation (search report)
See references of WO 2016177572A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016177572 A1 20161110; CN 107567558 A 20180109; CN 107567558 B 20191227; DE 102015106916 A1 20161110; EP 3292330 A1 20180314; JP 2018515727 A 20180614; KR 20170137950 A 20171213
DOCDB simple family (application)
EP 2016058697 W 20160420; CN 201680025804 A 20160420; DE 102015106916 A 20150504; EP 16721369 A 20160420; JP 2017557398 A 20160420; KR 20177034754 A 20160420