EP 3295476 A1 20180321 - CONTACT-VIA-CHAIN AS CORROSION DETECTOR
Title (en)
CONTACT-VIA-CHAIN AS CORROSION DETECTOR
Title (de)
KONTAKTVIAKETTE ALS KORROSIONSDETEKTOR
Title (fr)
CHAÎNE DE CONTACTS ET DE TROUS MÉTALLISÉS EN TANT QUE DÉTECTEUR DE CORROSION
Publication
Application
Priority
- DE 102015107328 A 20150511
- EP 2016060286 W 20160509
Abstract (en)
[origin: WO2016180756A1] The invention relates to a detector (100) for determining a faulty semiconductor component (101), comprising a semiconductor component (101), a contact-via-chain (102) which is arranged laterally at a distance to the semiconductor component (101) and surrounds the semiconductor component (101) in some regions, a guard ring (103) which is arranged laterally at a distance to the semiconductor component (101), and an evaluation unit (104) which is arranged on the semiconductor component (101), characterised in that the evaluation unit (104) is configured to apply an electrical voltage to the contact-via-chain (102), in particular a permanent electrical voltage, to determine a resistance value of the contact-via-chain (102) and to generate an output signal, if the resistance value of the contact-via-chain (102) exceeds a threshold value.
IPC 8 full level
H01L 21/66 (2006.01); H01L 23/58 (2006.01)
CPC (source: EP US)
G01R 31/2607 (2013.01 - US); G01R 31/2644 (2013.01 - US); H01L 22/34 (2013.01 - EP US); H01L 23/5226 (2013.01 - US); H01L 23/528 (2013.01 - US); H01L 23/562 (2013.01 - US); H01L 23/585 (2013.01 - EP US)
Citation (search report)
See references of WO 2016180756A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016180756 A1 20161117; CN 107636815 A 20180126; EP 3295476 A1 20180321; TW 201709373 A 20170301; US 10431507 B2 20191001; US 2018138098 A1 20180517
DOCDB simple family (application)
EP 2016060286 W 20160509; CN 201680027765 A 20160509; EP 16721171 A 20160509; TW 105114552 A 20160511; US 201615573252 A 20160509