EP 3303846 B1 20200930 - VACUUM PUMP
Title (en)
VACUUM PUMP
Title (de)
VAKUUMPUMPE
Title (fr)
POMPE À VIDE
Publication
Application
Priority
- GB 201509386 A 20150601
- GB 2016051408 W 20160516
Abstract (en)
[origin: GB2538962A] A vacuum pump for differentially pumping a plurality of chambers comprises a plurality of compound pumping arrangements, supported, in a housing 12, on respective drive shafts 58, 96 for independent rotation by separate motors 64, 102. The housing includes first 24, second 18, third 16 and forth 14 housing inlets for receiving fluid, respectively, from first, second, third and fourth chambers. A first 30 of the pumping arrangement comprises a first pumping section 44, 46, 48, 50 comprising a turbo molecular pumping mechanism and the second pumping section 52, 54, 56 downstream from the first pumping section arranged such that fluid entering the pump from the first inlet passes through the first and second pumping sections and fluid entering the pump from the second inlet passes through only the second section. A second 28 of the pumping arrangements comprises a third pumping section 87 comprising a turbo molecular pumping mechanism and a fourth section 94 downstream from the first pumping section arranged such that fluid entering the second pumping arrangement from the third inlet passes through the third and fourth pumping sections and fluid entering the second pump from the fourth inlet passes through only the fourth section.
IPC 8 full level
F04D 19/04 (2006.01); F04D 25/16 (2006.01); F04D 29/52 (2006.01)
CPC (source: EP GB US)
F04D 19/02 (2013.01 - GB); F04D 19/04 (2013.01 - GB); F04D 19/042 (2013.01 - EP US); F04D 19/046 (2013.01 - EP GB US); F04D 25/06 (2013.01 - US); F04D 25/16 (2013.01 - EP US); F04D 29/522 (2013.01 - EP US); F04D 19/048 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
GB 201509386 D0 20150715; GB 2538962 A 20161207; GB 2538962 B 20190626; CA 2987510 A1 20161208; EP 3303846 A1 20180411; EP 3303846 B1 20200930; JP 2018516338 A 20180621; US 2018163732 A1 20180614; WO 2016193664 A1 20161208
DOCDB simple family (application)
GB 201509386 A 20150601; CA 2987510 A 20160516; EP 16723492 A 20160516; GB 2016051408 W 20160516; JP 2017562699 A 20160516; US 201615578485 A 20160516