EP 3304198 A1 20180411 - METHOD FOR CONTROLLING THE SURFACE ENERGY AT THE INTERFACE BETWEEN A BLOCK COPOLYMER AND ANOTHER COMPOUND
Title (en)
METHOD FOR CONTROLLING THE SURFACE ENERGY AT THE INTERFACE BETWEEN A BLOCK COPOLYMER AND ANOTHER COMPOUND
Title (de)
VERFAHREN ZUR STEUERUNG DER OBERFLÄCHENENERGIE AN DER SCHNITTSTELLE ZWISCHEN EINEM BLOCKCOPOLYMER UND EINER ANDEREN VERBINDUNG
Title (fr)
PROCÉDÉ DE CONTRÔLE DE L'ÉNERGIE DE SURFACE A L'INTERFACE ENTRE UN COPOLYMERE A BLOCS ET UN AUTRE COMPOSÉ
Publication
Application
Priority
- FR 1554982 A 20150602
- FR 2016051252 W 20160526
Abstract (en)
[origin: WO2016193582A1] The invention concerns a method for controlling the surface energy at the top interface of a block copolymer (BPC1), the bottom interface of which is in contact with a previously neutralised surface of a substrate, so as to obtain an orientation of the nano-domains of said block copolymer (BPC1) perpendicular to the two bottom and top interfaces, said method consisting of covering the top surface of said block copolymer (BPC1) with a top surface neutralisation layer (TC), and being characterised in that said top surface neutralisation layer (TC) is constituted by a second block copolymer (BPC2).
IPC 8 full level
G03F 7/00 (2006.01)
CPC (source: EP KR US)
G03F 7/0002 (2013.01 - EP KR US); G03F 7/004 (2013.01 - KR); G03F 7/168 (2013.01 - US); G03F 7/2002 (2013.01 - US)
Citation (search report)
See references of WO 2016193582A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016193582 A1 20161208; CN 107735727 A 20180223; EP 3304198 A1 20180411; FR 3037070 A1 20161209; FR 3037070 B1 20190531; JP 2018524154 A 20180830; KR 20180005223 A 20180115; SG 11201709937S A 20171228; TW 201715296 A 20170501; US 2018173094 A1 20180621
DOCDB simple family (application)
FR 2016051252 W 20160526; CN 201680039637 A 20160526; EP 16730881 A 20160526; FR 1554982 A 20150602; JP 2017562680 A 20160526; KR 20177035413 A 20160526; SG 11201709937S A 20160526; TW 105116664 A 20160527; US 201615579063 A 20160526