EP 3304200 A1 20180411 - METHOD FOR REDUCING THE DEFECTIVITY OF A BLOCK COPOLYMER FILM
Title (en)
METHOD FOR REDUCING THE DEFECTIVITY OF A BLOCK COPOLYMER FILM
Title (de)
VERFAHREN ZUR DEFEKTREDUZIERUNG BEI EINER BLOCKCOPOLYMERFOLIE
Title (fr)
PROCÉDÉ DE RÉDUCTION DE LA DÉFECTIVITÉ D'UN FILM DE COPOLYMÈRE A BLOCS
Publication
Application
Priority
- FR 1554983 A 20150602
- FR 2016051251 W 20160526
Abstract (en)
[origin: WO2016193581A1] The invention concerns a method for reducing the defectivity of a block copolymer film (BPC1), the bottom surface of which is in contact with a previously neutralised surface (N) of a substrate (S) and the top surface of which is covered by a top surface neutralisation layer (TC), so as to obtain an orientation of the nano-domains of said block copolymer (BPC1) perpendicular to the two bottom and top interfaces, said method being characterised in that said top surface neutralisation layer (TC) implemented in order to cover the top surface of the block copolymer film (BCP1) is constituted by a second block copolymer (BPC2).
IPC 8 full level
G03F 7/00 (2006.01)
CPC (source: EP KR US)
C08L 27/12 (2013.01 - US); C08L 53/005 (2013.01 - US); G03F 7/0002 (2013.01 - EP KR US); G03F 7/004 (2013.01 - KR); C08G 2261/126 (2013.01 - US); C08G 2261/136 (2013.01 - US); C08G 2261/1426 (2013.01 - US); C08G 2261/146 (2013.01 - US); C08L 33/10 (2013.01 - US); C08L 2203/16 (2013.01 - US); G01R 33/46 (2013.01 - US)
Citation (search report)
See references of WO 2016193581A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016193581 A1 20161208; CN 107850836 A 20180327; EP 3304200 A1 20180411; FR 3037071 A1 20161209; FR 3037071 B1 20190621; JP 2018516301 A 20180621; KR 20180005224 A 20180115; SG 11201709707T A 20171228; TW 201702077 A 20170116; US 2018171134 A1 20180621
DOCDB simple family (application)
FR 2016051251 W 20160526; CN 201680044441 A 20160526; EP 16732319 A 20160526; FR 1554983 A 20150602; JP 2017562689 A 20160526; KR 20177035414 A 20160526; SG 11201709707T A 20160526; TW 105116665 A 20160527; US 201615579112 A 20160526