EP 3307927 A1 20180418 - METHOD FOR PRODUCING NANOSTRUCTURES
Title (en)
METHOD FOR PRODUCING NANOSTRUCTURES
Title (de)
VERFAHREN ZUR HERSTELLUNG VON NANOSTRUKTUREN
Title (fr)
PROCEDE DE FABRICATION DE NANOSTRUCTURES
Publication
Application
Priority
- FR 1555283 A 20150610
- EP 2016062721 W 20160603
Abstract (en)
[origin: WO2016198341A1] The invention relates to a method for producing at least one type of nanostructure (30, 35, 37), including the following steps: partially covering a surface of a layer or a single-crystal multilayer structure (3) using a discontinuous mask (4) which forms discrete islands having at least one sub-micrometric side dimension and is made of a material having an evaporation temperature greater than that of said layer or multilayer structure; and vacuum heating said layer or multilayer structure to a so-called etching temperature which is greater than the evaporation temperature of said layer or multilayer structure but less than that of said mask, so as to cause said layer or multilayer structure to evaporate outside the regions covered by said mask. The invention further relates to structures that can be produced using a method of this type.
IPC 8 full level
C30B 29/40 (2006.01); C30B 29/60 (2006.01); C30B 33/02 (2006.01)
CPC (source: EP KR US)
C30B 29/406 (2013.01 - EP KR US); C30B 29/60 (2013.01 - EP KR US); C30B 33/02 (2013.01 - EP KR US); H01L 29/22 (2013.01 - US); B82Y 40/00 (2013.01 - US); C30B 29/06 (2013.01 - US)
Citation (search report)
See references of WO 2016198341A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016198341 A1 20161215; CN 107849735 A 20180327; EP 3307927 A1 20180418; FR 3037341 A1 20161216; JP 2018526230 A 20180913; JP 6772192 B2 20201021; KR 20180017124 A 20180220; US 11085130 B2 20210810; US 2018327929 A1 20181115
DOCDB simple family (application)
EP 2016062721 W 20160603; CN 201680043103 A 20160603; EP 16729826 A 20160603; FR 1555283 A 20150610; JP 2017563925 A 20160603; KR 20187000777 A 20160603; US 201615579910 A 20160603