EP 3311145 A1 20180425 - METHODS AND APPARATUS FOR INSPECTING A SUBSTRATE FOR DEFECTS AND LOCATING SUCH DEFECTS IN THREE DIMENSIONS USING OPTICAL TECHNIQUES
Title (en)
METHODS AND APPARATUS FOR INSPECTING A SUBSTRATE FOR DEFECTS AND LOCATING SUCH DEFECTS IN THREE DIMENSIONS USING OPTICAL TECHNIQUES
Title (de)
VERFAHREN UND VORRICHTUNG ZUM UNTERSUCHEN EINES SUBSTRATS AUF DEFEKTE UND ORTUNG DERARTIGER DEFEKTE IN DREI DIMENSIONEN UNTER VERWENDUNG OPTISCHER TECHNIKEN
Title (fr)
PROCÉDÉS ET APPAREIL D'INSPECTION D'UN SUBSTRAT À LA RECHERCHE DE DÉFAUTS ET LOCALISATION DESDITS DÉFAUTS EN TROIS DIMENSIONS À L'AIDE DE TECHNIQUES OPTIQUES
Publication
Application
Priority
- US 201562181901 P 20150619
- US 2016037771 W 20160616
Abstract (en)
[origin: WO2016205456A1] Methods and apparatus for inspecting a substrate for defects and locating such defects in three dimensions include: orienting the substrate such that the substrate has a width dimension in an X-axis, a height dimension in a Y-axis, and a thickness dimension in a Z-axis; directing a first light beam from an angle of +A degrees from a Z-axis of symmetry; directing second light beam from an angle -A degrees from the Z-axis of symmetry; detecting the first and second light beams that have passed through, and have been affected by any defects a first and/or second opposing major surface of the substrate; and computing X, Y, and Z positions of the defects with sufficient precision to ascertain on which of the first and second opposing major surfaces of the substrate each of the defects are disposed.
IPC 8 full level
G01N 21/896 (2006.01)
CPC (source: CN EP)
G01N 21/8806 (2013.01 - CN EP); G01N 21/958 (2013.01 - CN EP); G01N 2021/8845 (2013.01 - CN EP); G01N 2021/8848 (2013.01 - CN EP); G01N 2021/8861 (2013.01 - CN EP)
Citation (search report)
See references of WO 2016205456A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016205456 A1 20161222; CN 107771281 A 20180306; EP 3311145 A1 20180425; JP 2018528396 A 20180927; KR 20180033186 A 20180402; TW 201702585 A 20170116
DOCDB simple family (application)
US 2016037771 W 20160616; CN 201680035929 A 20160616; EP 16732187 A 20160616; JP 2017565805 A 20160616; KR 20187001926 A 20160616; TW 105119151 A 20160617