EP 3325689 A4 20190417 - LITHOGRAPHY PROCESS FOR THE ENCAPSULATION OF PATTERNED THIN FILM COATINGS
Title (en)
LITHOGRAPHY PROCESS FOR THE ENCAPSULATION OF PATTERNED THIN FILM COATINGS
Title (de)
LITHOGRAFISCHES VERFAHREN ZUR VERKAPSELUNG VON GEMUSTERTEN DÜNNSCHICHTBESCHICHTUNGEN
Title (fr)
PROCÉDÉ DE LITHOGRAPHIE PERMETTANT L'ENCAPSULATION DE REVÊTEMENTS DE FILMS MINCES À MOTIFS
Publication
Application
Priority
- US 201562193174 P 20150716
- US 2016042419 W 20160715
IPC 8 full level
G03F 7/40 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP US)
G03F 7/168 (2013.01 - US); G03F 7/40 (2013.01 - EP); H01L 21/0272 (2013.01 - EP)
Citation (search report)
- [A] US 2006154412 A1 20060713 - BRODSKY COLIN J [US], et al
- [A] US 4202914 A 19800513 - HAVAS JANOS [US], et al
- [A] US 2009111061 A1 20090430 - CHAU FRANK HIN FAI [US], et al
- See references of WO 2017011723A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 16825231 A 20160715