EP 3325950 A1 20180530 - APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Title (en)
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Title (de)
VORRICHTUNG MIT MEHREREN GELADENEN TEILCHENSTRAHLEN
Title (fr)
APPAREIL AYANT DE MULTIPLES FAISCEAUX DE PARTICULES CHARGÉES
Publication
Application
Priority
- US 201562195353 P 20150722
- US 2016043375 W 20160721
Abstract (en)
[origin: WO2017015483A1] A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit forms plural and parallel images of one single electron source by deflecting plural beamlets of a parallel primary-electron beam therefrom, and one objective lens focuses the plural deflected beamlets onto a sample surface and forms plural probe spots thereon. A movable condenser lens is used to collimate the primary-electron beam and vary the currents of the plural probe spots, a pre-beamlet-forming means weakens the Coulomb effect of the primary-electron beam, and the source- conversion unit minimizes the sizes of the plural probe spots by minimizing and compensating the off-axis aberrations of the objective lens and condenser lens.
IPC 8 full level
G01N 23/225 (2018.01); H01J 37/10 (2006.01); H01J 37/28 (2006.01)
CPC (source: CN EP IL KR US)
H01J 37/06 (2013.01 - CN IL US); H01J 37/10 (2013.01 - EP IL KR US); H01J 37/12 (2013.01 - CN); H01J 37/141 (2013.01 - CN); H01J 37/145 (2013.01 - CN); H01J 37/1474 (2013.01 - CN IL US); H01J 37/1475 (2013.01 - CN); H01J 37/1477 (2013.01 - CN EP IL KR US); H01J 37/1478 (2013.01 - CN EP IL KR US); H01J 37/28 (2013.01 - CN EP IL KR US); H01J 2237/024 (2013.01 - CN EP IL KR US); H01J 2237/0453 (2013.01 - CN EP IL KR US); H01J 2237/0492 (2013.01 - CN EP IL KR US); H01J 2237/103 (2013.01 - CN EP IL KR US); H01J 2237/1205 (2013.01 - CN EP IL KR US); H01J 2237/14 (2013.01 - CN); H01J 2237/1516 (2013.01 - CN EP IL KR US); H01J 2237/1534 (2013.01 - CN EP IL KR US); H01J 2237/1536 (2013.01 - CN EP IL KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2017015483 A1 20170126; CN 108738363 A 20181102; CN 108738363 B 20200807; CN 111681939 A 20200918; CN 111681939 B 20231027; EP 3325950 A1 20180530; EP 3325950 A4 20190417; EP 3325950 B1 20201104; EP 3809124 A2 20210421; EP 3809124 A3 20220316; IL 256895 A 20180329; IL 256895 B 20220801; IL 294759 A 20220901; JP 2018520495 A 20180726; JP 6703092 B2 20200603; KR 102007497 B1 20190805; KR 102651558 B1 20240326; KR 20180030605 A 20180323; KR 20190091577 A 20190806; KR 20220134790 A 20221005; US 10395886 B2 20190827; US 10879031 B2 20201229; US 11587758 B2 20230221; US 11887807 B2 20240130; US 2017025243 A1 20170126; US 2020152412 A1 20200514; US 2021233736 A1 20210729; US 2023282441 A1 20230907
DOCDB simple family (application)
US 2016043375 W 20160721; CN 201680051694 A 20160721; CN 202010663424 A 20160721; EP 16828551 A 20160721; EP 20200621 A 20160721; IL 25689518 A 20180114; IL 29475922 A 20220713; JP 2018503180 A 20160721; KR 20187003901 A 20160721; KR 20197022495 A 20160721; KR 20227033146 A 20160721; US 201615216258 A 20160721; US 201916551655 A 20190826; US 202017135969 A 20201228; US 202318158444 A 20230123