EP 3330762 B1 20190522 - METHOD FOR ADJUSTING AN OPTICAL DEVICE
Title (en)
METHOD FOR ADJUSTING AN OPTICAL DEVICE
Title (de)
VERFAHREN ZUR EINSTELLUNG EINER OPTISCHEN VORRICHTUNG
Title (fr)
PROCÉDÉ DE RÉGLAGE D'UN DISPOSITIF OPTIQUE
Publication
Application
Priority
DE 102016212853 A 20160714
Abstract (en)
[origin: CN107621756A] A method for adjusting an optical device (200), in particular for a photoetching device (100A, 100B) is disclosed. The optical device includes a movable component (326, 700), a reference component (318, 346, 702) and an optical component (202, 706), wherein the movable component (326, 700) is connected to the optical component (202, 706) through a mechanical operative connection element (328, 704). The method includes a) fixing (S1) the movable component (326, 700) to a mechanically defined position (NP) with respect to the reference component (318, 346, 702); b) optically measuring (S2) the optical component (202, 706) to obtain an optical measurement result (OM); and c) adjusting (S8) the optical device (200) according to the measurement result (OM).
IPC 8 full level
G03F 7/20 (2006.01); G02B 7/182 (2006.01)
CPC (source: EP KR)
G02B 7/1828 (2013.01 - EP); G02B 17/06 (2013.01 - KR); G02B 26/0816 (2013.01 - EP); G03F 7/70033 (2013.01 - KR); G03F 7/70075 (2013.01 - EP); G03F 7/70116 (2013.01 - EP); G03F 7/70141 (2013.01 - EP); G03F 7/70308 (2013.01 - KR); G03F 7/70825 (2013.01 - EP); G03F 7/70833 (2013.01 - KR); H01L 21/0274 (2013.01 - KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102016212853 B3 20171109; CN 107621756 A 20180123; CN 107621756 B 20211109; EP 3330762 A1 20180606; EP 3330762 B1 20190522; KR 102414479 B1 20220630; KR 20180008316 A 20180124; TW 201809797 A 20180316; TW I747923 B 20211201
DOCDB simple family (application)
DE 102016212853 A 20160714; CN 201710604021 A 20170713; EP 17180813 A 20170711; KR 20170088964 A 20170713; TW 106123491 A 20170713