EP 3335249 A1 20180620 - APPARATUS FOR PROCESSING OF A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL, AND METHOD FOR PROCESSING OF A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL
Title (en)
APPARATUS FOR PROCESSING OF A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL, AND METHOD FOR PROCESSING OF A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL
Title (de)
VORRICHTUNG ZUR BEARBEITUNG EINES BEI DER HERSTELLUNG EINER SOLARZELLE VERWENDETEN SUBSTRATS UND VERFAHREN ZUR BEARBEITUNG EINES BEI DER HERSTELLUNG EINER SOLARZELLE VERWENDETEN SUBSTRATS
Title (fr)
APPAREIL DE TRAITEMENT D'UN SUBSTRAT UTILISÉ DANS LA FABRICATION D'UNE CELLULE SOLAIRE, ET PROCÉDÉ DE TRAITEMENT D'UN SUBSTRAT UTILISÉ DANS LA FABRICATION D'UNE CELLULE SOLAIRE
Publication
Application
Priority
EP 2016076086 W 20161028
Abstract (en)
[origin: WO2018077422A1] An apparatus (100) for processing of a substrate (10) used in the manufacture of a solar cell is provided. The apparatus (100) includes an inspection assembly (110) configured to detect a first dimension of a first line pattern (13) on a first substrate, a processing device (120) configured to provide a second line pattern (14) over the first line pattern (13) to form a combined line pattern (12), wherein the inspection assembly (110) is further configured to detect a second dimension of the combined line pattern (12), and an alignment device (130) configured to align at least one of the processing device (120) and a second substrate based on the first dimension and the second dimension.
IPC 8 full level
H01L 31/18 (2006.01)
CPC (source: EP)
H01L 31/18 (2013.01); H01L 31/1876 (2013.01); Y02E 10/50 (2013.01); Y02P 70/50 (2015.11)
Citation (search report)
See references of WO 2018077422A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2018077422 A1 20180503; CN 109844964 A 20190604; CN 109844964 B 20221206; EP 3335249 A1 20180620; TW 201830721 A 20180816
DOCDB simple family (application)
EP 2016076086 W 20161028; CN 201680027351 A 20161028; EP 16787898 A 20161028; TW 106135423 A 20171017