EP 3339652 B1 20200701 - VACUUM PUMP WITH INNER LINING TO RECEIVE DEPOSITS
Title (en)
VACUUM PUMP WITH INNER LINING TO RECEIVE DEPOSITS
Title (de)
VAKUUMPUMPE MIT EINER INNENVERKLEIDUNG ZUR AUFNAHME VON ABLAGERUNGEN
Title (fr)
POMPE À VIDE AVEC CHEMISE INTÉRIEURE RECUEILLANT DES DÉPÔTS
Publication
Application
Priority
EP 16206042 A 20161222
Abstract (en)
[origin: JP2018109401A] PROBLEM TO BE SOLVED: To provide a vacuum pump capable of being easily cleaned, and easily removing, in particular, accumulation of particles, fluid residues and the like from a pre-vacuum region of the vacuum pump.SOLUTION: A vacuum pump, in particular, a turbo molecular pump can be connected to a receiver, has housings 16, 90 having at least one inlet 14 for a fluid, in particular, a process gas or air, and at least one outlet 74 for a fluid, further has at least one pump step disposed in the housing for conveying the fluid, in particular, from the receiver from the inlet to the outlet through the vacuum pump 10, and here, a chamber is formed in the housing. At least one inner liner for accommodating the accumulation is disposed in the chamber in a manner of covering at least one face of the chamber, defining the chamber.SELECTED DRAWING: Figure 1
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/40 (2006.01); F04D 29/70 (2006.01)
CPC (source: EP)
F04D 19/04 (2013.01); F04D 29/403 (2013.01); F04D 29/701 (2013.01); F05D 2260/607 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3339652 A1 20180627; EP 3339652 B1 20200701; JP 2018109401 A 20180712; JP 6469205 B2 20190213
DOCDB simple family (application)
EP 16206042 A 20161222; JP 2017230365 A 20171130