EP 3346232 A1 20180711 - SURFACE-SHAPE MEASURING DEVICE AND SURFACE-SHAPE MEASURING PROGRAM
Title (en)
SURFACE-SHAPE MEASURING DEVICE AND SURFACE-SHAPE MEASURING PROGRAM
Title (de)
OBERFLÄCHENFORMMESSVORRICHTUNG UND OBERFLÄCHENFORMMESSPROGRAMM
Title (fr)
DISPOSITIF DE MESURE DE FORME DE SURFACE ET PROGRAMME DE MESURE DE FORME DE SURFACE
Publication
Application
Priority
- JP 2015171301 A 20150831
- JP 2016075576 W 20160831
Abstract (en)
A surface shape measurement apparatus includes: a stage which supports a measurement object; a measurement device which measures a surface shape of the measurement object in a contactless manner; an computation part which computes surface shape data of the measurement object based on an output value of the measurement device and predetermined reference shape data of the measurement object; and a calculation part which calculates, based on information of a target placement position of the measurement object on the stage, the surface shape data and the reference shape data, a placement error between an actual placement position of the measurement object on the stage and the target placement position, wherein the computation part updates surface shape data of the measurement object using the placement error.
IPC 8 full level
G01B 21/20 (2006.01); G01B 11/02 (2006.01); G01B 11/24 (2006.01); G01B 11/245 (2006.01); G01B 21/04 (2006.01)
CPC (source: EP)
G01B 11/2441 (2013.01); G01B 11/245 (2013.01); G01B 21/045 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3346232 A1 20180711; EP 3346232 A4 20180711; EP 3346232 B1 20240228; JP 6489221 B2 20190327; JP WO2017038903 A1 20180607; WO 2017038903 A1 20170309
DOCDB simple family (application)
EP 16841933 A 20160831; JP 2016075576 W 20160831; JP 2017538089 A 20160831