EP 3347912 A1 20180718 - SECONDARY ION MASS SPECTROMETER AND SECONDARY ION MASS SPECTROMETRIC METHOD
Title (en)
SECONDARY ION MASS SPECTROMETER AND SECONDARY ION MASS SPECTROMETRIC METHOD
Title (de)
SEKUNDÄRIONEN-MASSENSPEKTROMETER UND SEKUNDÄRIONEN-MASSENSPEKTROMETRISCHES VERFAHREN
Title (fr)
SPECTROMÈTRE DE MASSE À IONISATION SECONDAIRE, ET PROCÉDÉ DE SPECTROMÉTRIE DE MASSE À IONISATION SECONDAIRE
Publication
Application
Priority
- DE 102015217433 A 20150911
- EP 2016071225 W 20160908
Abstract (en)
[origin: WO2017042293A1] The invention relates to a secondary ion mass spectrometer and to a method for the secondary ion mass spectrometric analysis of a sample. A large number of secondary ion mass spectrometers is known in the prior art. Among said secondary ion mass spectrometers, the time-of-flight secondary ion mass spectrometer (ToF-SIMS) in particular is of interest.
IPC 8 full level
H01J 49/00 (2006.01); H01J 49/10 (2006.01); H01J 49/14 (2006.01)
CPC (source: EP KR US)
G01N 23/2258 (2013.01 - EP); H01J 49/009 (2013.01 - EP KR US); H01J 49/107 (2013.01 - EP KR US); H01J 49/142 (2013.01 - EP KR US); H01J 49/40 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2017042293 A1 20170316; CA 2996854 A1 20170316; CA 2996854 C 20221129; CN 108028168 A 20180511; CN 108028168 B 20210330; EP 3347912 A1 20180718; JP 2018533169 A 20181108; JP 6716687 B2 20200701; KR 102186789 B1 20201207; KR 20180050730 A 20180515; US 10354851 B2 20190716; US 2018269046 A1 20180920
DOCDB simple family (application)
EP 2016071225 W 20160908; CA 2996854 A 20160908; CN 201680052793 A 20160908; EP 16762828 A 20160908; JP 2018512847 A 20160908; KR 20187009956 A 20160908; US 201615756229 A 20160908