EP 3365913 B1 20210616 - COMPOSITE DEVICE WITH CYLINDRICAL ANISOTROPIC THERMAL CONDUCTIVITY
Title (en)
COMPOSITE DEVICE WITH CYLINDRICAL ANISOTROPIC THERMAL CONDUCTIVITY
Title (de)
VERBUNDVORRICHTUNG MIT ZYLINDRISCHER ANISOTROPER WÄRMELEITFÄHIGKEIT
Title (fr)
DISPOSITIF COMPOSITE AVEC CONDUCTIVITÉ THERMIQUE ANISOTROPE CYLINDRIQUE
Publication
Application
Priority
- US 201514886783 A 20151019
- US 2016056547 W 20161012
Abstract (en)
[origin: US2017111958A1] An apparatus for supporting a substrate in a process chamber and regulating surface temperature of the substrate and method of making the same is provided. The apparatus includes a base support having a surface adapted to support the substrate and a heater for heating the substrate with the heater being disposed proximate the base support. The base support is made of a composite material comprising a plurality of thermally conductive arcuate members embedded within a matrix, each of the plurality thermally conductive arcuate members being arranged concentrically and defining predetermined intervals in a radial direction such that the composite material provides an anisotropic thermal conductivity in radial (ρ), azimuthal (φ) and axial (z) directions in a cylindrical coordinate system of the base support.
IPC 8 full level
H01L 21/67 (2006.01)
CPC (source: EP KR US)
H01L 21/67103 (2013.01 - EP KR US); H01L 21/67109 (2013.01 - EP KR US); H01L 21/67115 (2013.01 - EP KR US); H01L 21/67248 (2013.01 - KR); H05B 1/0233 (2013.01 - KR US); H05B 3/267 (2013.01 - KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
US 10154542 B2 20181211; US 2017111958 A1 20170420; CN 108701628 A 20181023; CN 108701628 B 20191008; EP 3365913 A1 20180829; EP 3365913 B1 20210616; JP 2018533216 A 20181108; JP 6538974 B2 20190703; KR 101975316 B1 20190507; KR 20180071307 A 20180627; TW 201719792 A 20170601; TW I654699 B 20190321; WO 2017069977 A1 20170427
DOCDB simple family (application)
US 201514886783 A 20151019; CN 201680072098 A 20161012; EP 16790781 A 20161012; JP 2018520156 A 20161012; KR 20187013853 A 20161012; TW 105133513 A 20161018; US 2016056547 W 20161012