EP 3401273 A1 20181114 - METHOD OF MAKING A MULTI-CAVITY MEMS DEVICE WITH DIFFERENT PRESSURES IN THE CAVITIES
Title (en)
METHOD OF MAKING A MULTI-CAVITY MEMS DEVICE WITH DIFFERENT PRESSURES IN THE CAVITIES
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER MEHRFACHHOHLRAUM-MEMS-VORRICHTUNG MIT UNTERSCHIEDLICHEN DRÜCKEN IN DEN HOHLRÄUMEN
Title (fr)
PROCÉDÉ DE FABRICATION D'UN DISPOSITIF MEMS À CAVITÉS MULTIPLES AVEC DIFFÉRENTES PRESSIONS DANS LES CAVITÉS
Publication
Application
Priority
SE 1651737 A 20161222
Abstract (en)
The present invention relates to a method of making a MEMS device (40) requiring more than one cavity (20', 20"), each cavity having different atmospheres in terms of pressure and/or composition, and a MEMS device having cavities (20', 20") with different atmospheres. The different atmospheres are obtained by combined use of gettering structures (26) and implanted gaseous species (28), which upon thermal activation removes unwanted species (gettering) from cavities (20', 20") and provides controlled atmosphere by release of implanted gas in the cavities (20', 20").
IPC 8 full level
B81B 7/00 (2006.01); B81B 7/02 (2006.01); B81C 1/00 (2006.01)
CPC (source: EP)
B81B 7/02 (2013.01); B81C 1/00285 (2013.01); B81C 2203/0118 (2013.01); B81C 2203/036 (2013.01)
Citation (search report)
- [XI] US 2015158720 A1 20150611 - LIM MARTIN [US]
- [A] US 2014225206 A1 20140814 - LIN YIZHEN [US], et al
- [A] WO 2015119564 A1 20150813 - SILEX MICROSYSTEMS AB [SE]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
EP 17208918 A 20171220