EP 3436622 B1 20240320 - A METHOD FOR ETCHING A METAL SURFACE
Title (en)
A METHOD FOR ETCHING A METAL SURFACE
Title (de)
VERFAHREN ZUM ÄTZEN EINER METALLOBERFLÄCHE
Title (fr)
PROCÉDÉ DE GRAVURE D'UNE SURFACE MÉTALLIQUE
Publication
Application
Priority
- US 201662316903 P 20160401
- US 2017025270 W 20170331
Abstract (en)
[origin: WO2017173212A1] A method for etching a metal surface includes a step of contacting a metal surface with a protic compound for a first time period to produce a first modified surface. The first modified surface is contacted with a protic ligand-forming compound that reacts with the first modified surface to form a volatile metal-containing compound including a metal atom and the protic ligand-forming compound. The volatile metal-containing compound is removed from the vicinity of the metal surface.
IPC 8 full level
C23F 1/12 (2006.01); C23F 1/00 (2006.01); H01L 21/3213 (2006.01)
CPC (source: EP US)
C23C 16/45553 (2013.01 - US); C23C 16/56 (2013.01 - US); C23F 1/00 (2013.01 - EP US); C23F 1/12 (2013.01 - EP US); C23F 4/00 (2013.01 - US); H01L 21/32135 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2017173212 A1 20171005; EP 3436622 A1 20190206; EP 3436622 A4 20191225; EP 3436622 B1 20240320; US 10982336 B2 20210420; US 2019112716 A1 20190418
DOCDB simple family (application)
US 2017025270 W 20170331; EP 17776739 A 20170331; US 201716090307 A 20170331