EP 3436833 A1 20190206 - PROBE SYSTEMS, STORAGE MEDIA, AND METHODS FOR WAFER-LEVEL TESTING OVER EXTENDED TEMPERATURE RANGES
Title (en)
PROBE SYSTEMS, STORAGE MEDIA, AND METHODS FOR WAFER-LEVEL TESTING OVER EXTENDED TEMPERATURE RANGES
Title (de)
SONDENSYSTEME, SPEICHERMEDIUM UND VERFAHREN ZUR PRÜFUNG AUF WAFEREBENE ÜBER ERWEITERTE TEMPERATURBEREICHE
Title (fr)
SYSTÈMES DE SONDE, SUPPORTS DE STOCKAGE ET PROCÉDÉS DE TEST AU NIVEAU DE LA TRANCHE SUR DES PLAGES DE TEMPÉRATURE ÉTENDUES
Publication
Application
Priority
- US 201662317168 P 20160401
- US 201715471199 A 20170328
- US 2017024748 W 20170329
Abstract (en)
[origin: US2017285083A1] Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct a probe system to perform the methods.
IPC 8 full level
G01R 1/04 (2006.01); G01R 1/073 (2006.01); G01R 1/44 (2006.01); G01R 31/02 (2006.01); G01R 31/20 (2006.01)
CPC (source: EP US)
G01R 31/003 (2013.01 - US); G01R 31/2863 (2013.01 - EP US); G01R 31/2874 (2013.01 - EP US); G01R 31/2887 (2013.01 - EP); G01R 31/287 (2013.01 - EP); G01R 31/2891 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
US 10060963 B2 20180828; US 2017285083 A1 20171005; EP 3436833 A1 20190206; EP 3436833 A4 20200108; EP 3436833 B1 20230329; TW 201736854 A 20171016; TW I628441 B 20180701; WO 2017172917 A1 20171005
DOCDB simple family (application)
US 201715471199 A 20170328; EP 17776548 A 20170329; TW 106110833 A 20170330; US 2017024748 W 20170329