EP 3441617 B1 20191225 - METHOD FOR HEATING A ROTOR OF A VACUUM PUMP
Title (en)
METHOD FOR HEATING A ROTOR OF A VACUUM PUMP
Title (de)
VERFAHREN ZUM ERWÄRMEN EINES ROTORS EINER VAKUUMPUMPE
Title (fr)
PROCÉDÉ DE CHAUFFAGE D'UN ROTOR D'UNE POMPE À VIDE
Publication
Application
Priority
EP 17185534 A 20170809
Abstract (en)
[origin: JP2019031969A] To provide a method of heating a rotor of a vacuum pump, that is, a method of heating the rotor to a temperature high enough for bake-out, and not requiring additional feed of a gas into vacuum equipment.SOLUTION: In a method of heating a rotor (17) in a vacuum pump (11), in particular, in a turbo molecular pump (11), the vacuum pump has the rotor (17) operated by an electric motor (19), and a temperature of the rotor is kept in an ambient temperature zone in a first operation situation of the vacuum pump. In a second operation situation, eddy current is generated in the rotor (17) so that the rotor (17) is heated to a desired temperature over the ambient temperature.SELECTED DRAWING: Figure 3
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/58 (2006.01)
CPC (source: EP)
F04D 19/04 (2013.01); F04D 29/584 (2013.01)
Citation (examination)
JP 2013079602 A 20130502 - SHIMADZU CORP
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3441617 A1 20190213; EP 3441617 B1 20191225; JP 2019031969 A 20190228; JP 6770024 B2 20201014
DOCDB simple family (application)
EP 17185534 A 20170809; JP 2018120626 A 20180626