EP 3442691 A4 20191218 - METHOD, SYSTEM, AND DEVICE FOR DELIVERY OF PROCESS GAS
Title (en)
METHOD, SYSTEM, AND DEVICE FOR DELIVERY OF PROCESS GAS
Title (de)
VERFAHREN, SYSTEM UND VORRICHTUNG ZUR ABGABE VON PROZESSGAS
Title (fr)
PROCÉDÉ, SYSTÈME ET DISPOSITIF POUR LA DISTRIBUTION DE GAZ DE PROCÉDÉ
Publication
Application
Priority
- US 201662323697 P 20160416
- US 2017027634 W 20170414
Abstract (en)
[origin: WO2017181013A1] Provided herein are methods, systems, and devices for the vapor phase delivery of high purity process gases to a critical process or application.
IPC 8 full level
B01F 23/10 (2022.01); B01B 1/00 (2006.01); B01D 53/44 (2006.01); B01D 53/77 (2006.01); B01D 69/02 (2006.01); B01D 71/36 (2006.01); B01J 20/292 (2006.01); C23C 16/448 (2006.01); F17C 11/00 (2006.01); H01G 4/06 (2006.01); B01D 63/02 (2006.01); B01D 69/08 (2006.01)
CPC (source: EP KR US)
B01B 1/005 (2013.01 - EP); B01D 53/44 (2013.01 - KR); B01D 53/78 (2013.01 - KR); B01D 61/363 (2022.08 - EP); B01D 63/02 (2013.01 - US); B01D 69/02 (2013.01 - EP); B01D 71/36 (2013.01 - EP); B01F 23/10 (2022.01 - KR); C23C 16/4481 (2013.01 - EP); F17C 11/00 (2013.01 - EP); H01G 4/06 (2013.01 - KR); B01D 63/02 (2013.01 - EP); B01D 69/08 (2013.01 - EP); B01D 2053/223 (2013.01 - EP); B01D 2325/42 (2013.01 - EP)
Citation (search report)
No further relevant documents disclosed
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2017181013 A1 20171019; CN 109152990 A 20190104; CN 109152990 B 20211109; DE 17783234 T1 20190627; EP 3442691 A1 20190220; EP 3442691 A4 20191218; JP 2019521948 A 20190808; JP 6918921 B2 20210811; KR 102483803 B1 20221230; KR 20180135915 A 20181221
DOCDB simple family (application)
US 2017027634 W 20170414; CN 201780029147 A 20170414; DE 17783234 T 20170414; EP 17783234 A 20170414; JP 2019505137 A 20170414; KR 20187031690 A 20170414