EP 3462036 A1 20190403 - TURBOMOLECULAR VACUUM PUMP
Title (en)
TURBOMOLECULAR VACUUM PUMP
Title (de)
TURBOMOLEKULARVAKUUMPUMPE
Title (fr)
POMPE À VIDE TURBOMOLÉCULAIRE
Publication
Application
Priority
EP 17194409 A 20171002
Abstract (en)
[origin: JP2019065857A] To further increase contribution, in particular, on vacuum performance of a rotor disc.SOLUTION: A turbomolecular pump has at least two rotor discs (400) arranged adjacently. The rotor discs each have a plurality of blades (402) dispersedly arranged in a peripheral direction. The blades extend radially outward from a blade base part (404). Here, in at least one blade base part (404) of each rotor disc (400), at least one tooth-like projection part (412) is provided.SELECTED DRAWING: Figure 1
Abstract (de)
Turbomolekularvakuumpumpe umfassend wenigstens zwei benachbart angeordnete Rotorscheiben (400), die jeweils eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Schaufeln (402) aufweisen, welche sich jeweils ausgehend von einem Schaufelgrund (404) radial nach außen erstrecken, wobei an wenigstens einem Schaufelgrund einer jeweiligen Rotorscheibe wenigstens ein, insbesondere zahnartiger, Vorsprung (412) vorgesehen ist.
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/32 (2006.01); F04D 29/38 (2006.01); F04D 29/66 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 29/321 (2013.01); F05D 2250/70 (2013.01)
Citation (search report)
- [XAI] DE 102008056352 A1 20100512 - OERLIKON LEYBOLD VACUUM GMBH [DE]
- [XAI] JP H05106588 A 19930427 - NTN TOYO BEARING CO LTD
- [XAI] JP S60203375 A 19851014 - HITACHI LTD
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3462036 A1 20190403; EP 3462036 B1 20240403; JP 2019065857 A 20190425; JP 6716656 B2 20200701
DOCDB simple family (application)
EP 17194409 A 20171002; JP 2018183168 A 20180928