EP 3472583 A1 20190424 - THERMOPILE INFRARED INDIVIDUAL SENSOR FOR MEASURING TEMPERATURE OR DETECTING GAS
Title (en)
THERMOPILE INFRARED INDIVIDUAL SENSOR FOR MEASURING TEMPERATURE OR DETECTING GAS
Title (de)
THERMOPILE INFRAROT EINZELSENSOR FÜR TEMPERATURMESSUNGEN ODER ZUR GASDETEKTION
Title (fr)
CAPTEUR ÉLÉMENTAIRE INFRAROUGE THERMOPILE POUR MESURES DE TEMPÉRATURES OU DÉTECTION DE GAZ
Publication
Application
Priority
- DE 102016111349 A 20160621
- EP 2017064429 W 20170613
Abstract (en)
[origin: WO2017220381A1] The invention relates to a thermopile infrared individual sensor in a housing that is filled with a gaseous medium having optics and one or more sensor chips with individual sensor cells with infrared sensor structures with reticulated membranes, the infrared-sensitive regions of which are spanned by, in each case, at least one beam over a cavity in a carrier body with good thermal conduction. The object of the invention consists of specifying a thermopile infrared sensor using monolithic Si-micromechanics technology for contactless temperature measurements, which, in the case of a sufficiently large receiver surface, outputs a high signal with a high response speed and which can operated in a gaseous medium with normal pressure or reduced pressure and which is producible in mass produced numbers without complicated technology for sealing the housing. This is achieved by virtue of, in each case, combining a plurality of individual adjacent sensor cells (18) with respectively one infrared-sensitive region with thermopile structures (14, 15) on the membrane (12) on a common carrier body (1) of an individual chip to a single thermopile sensor structure with a signal output in the housing, consisting of a cap (12) sealed with a base plate (3) with a common gaseous medium (10).
IPC 8 full level
G01J 5/00 (2006.01); G01J 5/12 (2006.01); H10N 10/17 (2023.01)
CPC (source: EP KR US)
G01J 5/0014 (2013.01 - EP KR US); G01J 5/004 (2013.01 - KR); G01J 5/0225 (2013.01 - EP US); G01J 5/045 (2013.01 - EP US); G01J 5/048 (2013.01 - EP US); G01J 5/06 (2013.01 - EP US); G01J 5/12 (2013.01 - EP KR US); G01J 5/14 (2013.01 - EP US); G01N 21/3504 (2013.01 - US); G01J 2005/065 (2013.01 - EP US); G01J 2005/123 (2013.01 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102017113023 A1 20171221; CN 109313079 A 20190205; EP 3472583 A1 20190424; JP 2019518960 A 20190704; KR 102214389 B1 20210208; KR 20190016538 A 20190218; US 10794768 B2 20201006; US 2019265105 A1 20190829; US 2020370963 A1 20201126; WO 2017220381 A1 20171228
DOCDB simple family (application)
DE 102017113023 A 20170613; CN 201780038145 A 20170613; EP 17729482 A 20170613; EP 2017064429 W 20170613; JP 2018564957 A 20170613; KR 20197000195 A 20170613; US 201716309513 A 20170613; US 202016947599 A 20200807