EP 3475625 B1 20211013 - CLEANROOM CONTROL SYSTEM AND METHOD
Title (en)
CLEANROOM CONTROL SYSTEM AND METHOD
Title (de)
REINRAUMSTEUERUNGSSYSTEM UND REINRAUMSTEUERUNGSVERFAHREN
Title (fr)
SYSTÈME ET PROCÉDÉ DE COMMANDE DE SALLE BLANCHE
Publication
Application
Priority
- GB 201611107 A 20160627
- GB 2017051837 W 20170623
Abstract (en)
[origin: GB2551714A] A control system for controlling air volume so as to maintain a desired concentration of airborne contamination in a cleanroom. Where the cleanroom is supplied by a HVAC system 12 which supplies treated air to the cleanroom. The control system feature sensing means 48 for sensing a concentration of non-viable particles or viable particles in real time or near real time. Processing means are also provided for comparing the sensed concentration of non-viable particles or viable particles against the desired concentration of airborne contamination and outputting at least one control signal to the HVAC system 12 based on the comparison. Optionally, the processing means receives energy price data or usage data. Optionally, there is provide one or more secondary sensing means for sensing an environmental condition or process condition or HVAC system condition in real time or near real time.
IPC 8 full level
F24F 3/16 (2021.01); B01L 1/04 (2006.01); F24F 3/167 (2021.01); F24F 11/30 (2018.01); F24F 11/62 (2018.01); F24F 110/50 (2018.01)
CPC (source: EP GB US)
B01L 1/04 (2013.01 - EP US); F24F 3/167 (2021.01 - EP GB US); F24F 11/30 (2017.12 - EP GB US); F24F 11/62 (2017.12 - EP US); B01L 2200/146 (2013.01 - EP US); B01L 2200/147 (2013.01 - EP US); F24F 11/46 (2017.12 - EP US); F24F 2110/50 (2017.12 - EP US)
Citation (examination)
- EP 1515100 A1 20050316 - SANKYO SEIKI SEISAKUSHO KK [JP]
- US 2002193064 A1 20021219 - MICHALAKOS PETER [US], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
GB 201611107 D0 20160810; GB 2551714 A 20180103; AU 2017289701 A1 20190131; AU 2017289701 B2 20201203; CN 109312941 A 20190205; CN 109312941 B 20220617; DK 3475625 T3 20220110; EP 3475625 A1 20190501; EP 3475625 B1 20211013; ES 2902870 T3 20220330; PL 3475625 T3 20220419; SG 11201811173V A 20190130; US 2019234631 A1 20190801; WO 2018002589 A1 20180104
DOCDB simple family (application)
GB 201611107 A 20160627; AU 2017289701 A 20170623; CN 201780039232 A 20170623; DK 17734432 T 20170623; EP 17734432 A 20170623; ES 17734432 T 20170623; GB 2017051837 W 20170623; PL 17734432 T 20170623; SG 11201811173V A 20170623; US 201716311338 A 20170623