EP 3479422 A1 20190508 - POLING OF A PIEZOELECTRIC THIN FILM ELEMENT IN A PREFERRED ELECTRIC FIELD DRIVING DIRECTION
Title (en)
POLING OF A PIEZOELECTRIC THIN FILM ELEMENT IN A PREFERRED ELECTRIC FIELD DRIVING DIRECTION
Title (de)
POLUNG EINES PIEZOELEKTRISCHEN DÜNNSCHICHTELEMENTS IN EINER BEVORZUGTEN TREIBRICHTUNG DES ELEKTRISCHEN FELDES
Title (fr)
POLARISATION D'UN ÉLÉMENT À COUCHES MINCES PIÉZOÉLECTRIQUE DANS UNE DIRECTION D'ENTRAÎNEMENT DE CHAMP ÉLECTRIQUE PRÉFÉRÉE
Publication
Application
Priority
- GB 201611430 A 20160630
- GB 2017051926 W 20170630
Abstract (en)
[origin: GB2551803A] A piezoelectric thin film element is provided comprising a first electrode 26; a piezoelectric layer 24 formed on said first electrode; and a second electrode formed 22 on said piezoelectric layer. The piezoelectric layer is poled, by applying a poling electric field across said piezoelectric layer from said first electrode to said second electrode, wherein said second electrode is at a lower potential relative to said first electrode, and wherein said first and second electrodes are configured such that said second electrode is at a lower potential relative to said first electrode when said piezoelectric thin film element is deformed in a deformation direction predominantly opposite to said dipole direction. The first electrode may have a cavity 10 formed below it. The substrate 2 upon which the piezoelectric element is formed may be patterned to reduce the thickness of the substrate. These devices may be made as one of a plurality.
IPC 8 full level
H10N 30/045 (2023.01); H10N 30/20 (2023.01); B41J 2/14 (2006.01); H10N 30/077 (2023.01); H10N 30/078 (2023.01); H10N 30/30 (2023.01); H10N 30/80 (2023.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01)
CPC (source: EP GB)
B41J 2/161 (2013.01 - EP); B41J 2/1628 (2013.01 - EP); B41J 2/1632 (2013.01 - EP); B41J 2/1635 (2013.01 - EP); B41J 2/1642 (2013.01 - EP); B41J 2/1645 (2013.01 - EP); B41J 2/1646 (2013.01 - EP); H10N 30/045 (2023.02 - EP GB); H10N 30/078 (2023.02 - EP); H10N 30/2047 (2023.02 - EP); H10N 30/8554 (2023.02 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
GB 201611430 D0 20160817; GB 2551803 A 20180103; GB 2551803 B 20200401; EP 3479422 A1 20190508; JP 2019522902 A 20190815; WO 2018002648 A1 20180104
DOCDB simple family (application)
GB 201611430 A 20160630; EP 17737023 A 20170630; GB 2017051926 W 20170630; JP 2018567702 A 20170630