EP 3482181 A1 20190515 - DIFFERENTIAL PRESSURE SENSOR
Title (en)
DIFFERENTIAL PRESSURE SENSOR
Title (de)
DIFFERENZDRUCKSENSOR
Title (fr)
CAPTEUR DE PRESSION DIFFÉRENTIELLE
Publication
Application
Priority
- DE 102016112352 A 20160706
- EP 2017065634 W 20170626
Abstract (en)
[origin: WO2018007179A1] The invention relates to a differential pressure sensor for determining a pressure measurement signal, comprising the following: a differential pressure measuring cell which substantially has a semiconductor material, to which a first and a second pressure can be applied, and which outputs the pressure measurement signal using an electric converter element on the basis of a difference between the first and the second pressure; a first stiffening element that preferably has a ceramic or a semiconductor material, is joined to the differential pressure measuring cell by means of a first joining layer, and has a first channel via which the first pressure can be applied to the differential pressure measuring cell; and a second stiffening element that preferably has ceramic or a semiconductor material, is joined to the differential pressure measuring cell by means of a second joining layer, and has a second channel via which the second pressure can be applied to the differential pressure measuring cell; wherein the first and/or the second joining layer has an electrically conductive material, preferably a metal material, and the first and/or second joining layer is used to provide an electric functionality in addition to mechanically connecting the differential pressure measuring cell to the first and second stiffening element, respectively.
IPC 8 full level
G01L 9/00 (2006.01); G01L 9/12 (2006.01); G01L 13/02 (2006.01); G01L 19/00 (2006.01); G01L 19/06 (2006.01)
CPC (source: EP US)
G01L 9/0072 (2013.01 - EP US); G01L 13/025 (2013.01 - EP US); G01L 19/0084 (2013.01 - EP US); G01L 19/069 (2013.01 - EP US)
Citation (search report)
See references of WO 2018007179A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102016112352 A1 20180111; CN 109416291 A 20190301; EP 3482181 A1 20190515; US 2019170595 A1 20190606; WO 2018007179 A1 20180111
DOCDB simple family (application)
DE 102016112352 A 20160706; CN 201780042028 A 20170626; EP 17732447 A 20170626; EP 2017065634 W 20170626; US 201716315233 A 20170626