EP 3485168 B1 20200422 - METHOD FOR LOWERING THE PRESSURE IN A LOADING AND UNLOADING LOCK AND ASSOCIATED PUMPING UNIT
Title (en)
METHOD FOR LOWERING THE PRESSURE IN A LOADING AND UNLOADING LOCK AND ASSOCIATED PUMPING UNIT
Title (de)
VERFAHREN ZUR DRUCKABSENKUNG IN EINEM BE- UND ENTLADESCHLOSS UND ZUGEHÖRIGE PUMPENEINHEIT
Title (fr)
PROCÉDÉ DE DESCENTE EN PRESSION DANS UN SAS DE CHARGEMENT ET DE DÉCHARGEMENT ET GROUPE DE POMPAGE ASSOCIÉ
Publication
Application
Priority
- FR 1656782 A 20160713
- EP 2017066178 W 20170629
Abstract (en)
[origin: WO2018010970A1] The invention relates to a method for lowering the pressure in a lock for loading and unloading a substrate at atmospheric pressure by a pumping unit (1) including a primary vacuum pump (2) and a secondary vacuum pump (3) arranged upstream from said primary vacuum pump (2) in the direction of flow of the gases to be pumped. During the lowering of the pressure until the pressure in the loading and unloading lock reaches a predefined low-pressure threshold, the speed of rotation of the secondary vacuum pump (3) is controlled as a function of an operating parameter of the secondary vacuum pump (3) in order to increase the flow rate generated by the secondary vacuum pump (SoR) so that the flow rate generated by the secondary vacuum pump (SoR) is comprised in a range of which the upper value corresponds to six times the flow rate generated by the primary vacuum pump (Sol) and the low value corresponds to 1.3 times the flow rate generated by the primary vacuum pump (Sol). The invention also relates to a pumping unit for implementing said pressure-lowering method.
IPC 8 full level
F04C 18/12 (2006.01); F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04C 28/08 (2006.01)
CPC (source: EP KR)
F04C 18/126 (2013.01 - EP KR); F04C 25/02 (2013.01 - EP KR); F04C 28/02 (2013.01 - EP KR); F04C 28/08 (2013.01 - EP KR); F04C 2210/22 (2013.01 - KR); F04C 2220/30 (2013.01 - EP KR); F04C 2270/205 (2013.01 - EP KR); F05B 2210/12 (2013.01 - KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2018010970 A1 20180118; CN 109477485 A 20190315; CN 109477485 B 20200710; EP 3485168 A1 20190522; EP 3485168 B1 20200422; FR 3054005 A1 20180119; FR 3054005 B1 20180824; KR 102404612 B1 20220531; KR 20190022880 A 20190306; TW 201804083 A 20180201; TW I723186 B 20210401
DOCDB simple family (application)
EP 2017066178 W 20170629; CN 201780042978 A 20170629; EP 17735085 A 20170629; FR 1656782 A 20160713; KR 20197003693 A 20170629; TW 106120787 A 20170621