EP 3491165 A1 20190605 - IMPROVED GUIDANCE OF IONS FROM A PLASMA TO A SUBSTRATE TO BE COATED
Title (en)
IMPROVED GUIDANCE OF IONS FROM A PLASMA TO A SUBSTRATE TO BE COATED
Title (de)
VERBESSERTE LENKUNG VON IONEN AUS EINEM PLASMA AUF EIN ZU BESCHICHTENDES SUBSTRAT
Title (fr)
PROCÉDÉ AMÉLIORÉ DE GUIDAGE D'IONS PROVENANT D'UN PLASMA SUR UN SUBSTRAT À MUNIR D'UN REVÊTEMENT
Publication
Application
Priority
- DE 102016213951 A 20160728
- EP 2017065185 W 20170621
Abstract (en)
[origin: WO2018019482A1] The invention relates to a substrate holder (1) comprising a first contact (3) for the supply of a potential Us to the substrate (2), a charging region (12) on the surface (11) of the substrate holder (1) being designed such that it can be charged (13) with ions (101, 102) from the ion source (104) of a coating facility (100), and/or a second contact (4) is provided by means of which a freely selectable potential UH different from the potential Us can be applied to an electrode region (14) on the surface (11) of the substrate holder (1). The invention also relates to a coating facility (100) comprising at least one ion source (104) and a first voltage source (106) that can be connected to the substrate to be coated (2) such that gas ions (101) and/or ions (102) of a coating material (103) can be accelerated in the direction of the substrate (2) from the ion source (104) by means of an electric potential Us applied to the substrate (2) from the first voltage source (106), at least one secondary surface (11, 105), towards which ions (101, 102) missing the substrate (2) move, being designed (13, 113) such that it can be charged with arriving ions (101, 102), and/or at least one second voltage source (107) being provided, which can be connected to the secondary surface (11, 105) such that a freely selectable potential Us different from the potential Us can be applied to said secondary surface (11, 105). The invention further relates to an operating method and to a computer program product.
IPC 8 full level
C23C 14/50 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP US)
C23C 14/221 (2013.01 - US); C23C 14/50 (2013.01 - EP US); C23C 14/54 (2013.01 - US); C23C 16/4401 (2013.01 - EP); H01J 37/32403 (2013.01 - EP US); H01J 37/32422 (2013.01 - EP US); H01J 37/32706 (2013.01 - EP); H01J 37/32715 (2013.01 - EP US); H01J 37/32862 (2013.01 - EP)
Citation (search report)
See references of WO 2018019482A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2018019482 A1 20180201; CN 109477209 A 20190315; CN 109477209 B 20210514; DE 102016213951 A1 20180201; EP 3491165 A1 20190605; US 2020370169 A1 20201126
DOCDB simple family (application)
EP 2017065185 W 20170621; CN 201780045612 A 20170621; DE 102016213951 A 20160728; EP 17732864 A 20170621; US 201716319659 A 20170621