EP 3491243 A1 20190605 - EVACUATION SYSTEM
Title (en)
EVACUATION SYSTEM
Title (de)
EVAKUIERUNGSSYSTEM
Title (fr)
SYSTÈME D'ÉVACUATION
Publication
Application
Priority
EP 2016066488 W 20160712
Abstract (en)
[origin: WO2018010767A1] An evacuation system for evacuating a chamber comprises a pump arrangement including a main pump (1 ) of a first evacuation capacity and a backing pump (2) of a second evacuation capacity connected to the main pump by a pump connecting line (3). Further the evacuation system comprises a reservoir (4) connected to the pump connecting line (3) by a first reservoir line (5), a control unit (14), and at least one suction line (6; 7) for connecting the pump arrangement to the chamber (4). A suction line (6; 7) is connected to a suction side of the main pump (1 ) and/or to a suction side of the backing pump (2). The reservoir (4) is connected to the main pump (1 ) by a second reservoir line (8). The first reservoir line (5) comprises a non-return valve (9) and the second reservoir line (8) comprises a controlled valve (10), wherein the non-return valve (9) is switched depending on a pressure in the pump connecting line (3) and the controlled valve (10) is switched by the control unit (14).
IPC 8 full level
F04B 37/14 (2006.01); F04B 41/02 (2006.01); F04B 41/06 (2006.01); F04B 49/00 (2006.01); F04B 49/06 (2006.01)
CPC (source: EP)
F04B 37/14 (2013.01); F04B 41/02 (2013.01); F04B 41/06 (2013.01); F04B 49/007 (2013.01); F04B 49/065 (2013.01)
Citation (search report)
See references of WO 2018010767A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
EP 2016066488 W 20160712; EP 16738739 A 20160712