EP 3494432 A1 20190612 - INTERFEROMETER AND METHOD FOR OPERATING SAME
Title (en)
INTERFEROMETER AND METHOD FOR OPERATING SAME
Title (de)
INTERFEROMETER UND VERFAHREN ZUM BETREIBEN DESSELBEN
Title (fr)
INTERFÉROMÈTRE ET MODE DE FONCTIONNEMENT
Publication
Application
Priority
- DE 102016214565 A 20160805
- EP 2017068769 W 20170725
Abstract (en)
[origin: WO2018024543A1] The invention relates to an interferometer (200) having a first reflector element (202) and a second reflector element (206) spaced apart from the first reflector element (202) by an adjustable resonator gap (204), wherein the interferometer (200) has a first driving device (100) and a second driving device (102), wherein the first driving device (100) is designed to adjust a gap height (104) of the resonator gap (204), wherein the first driving device (100) has a first adjustment range (208), wherein the second driving device (102) is also designed to adjust the gap height (104), wherein the second driving device (102) has a second adjustment range (210) which supplements the first adjustment range (208).
IPC 8 full level
G02B 26/00 (2006.01); G01J 3/26 (2006.01)
CPC (source: EP)
G01J 3/26 (2013.01); G02B 26/001 (2013.01)
Citation (search report)
See references of WO 2018024543A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2018024543 A1 20180208; CN 109564344 A 20190402; DE 102016214565 A1 20180208; EP 3494432 A1 20190612
DOCDB simple family (application)
EP 2017068769 W 20170725; CN 201780049013 A 20170725; DE 102016214565 A 20160805; EP 17745315 A 20170725